FCC ID: QTA-SCLC RF CARRIER STATION LARGE COIL

EtchTemp Low Temperature (ET LT) Wafer User Manual KLA SensArray 7 Technology Drive. Milpitas, CA 95035 Phone : 1-408-875-1203 Fax : 1-408-352-2828 customer.support-sensarray@kla-tencor.com www.kla-tencor.com Copyright 2021 by KLA. All rights reserved worldwide. No parts of this publication may be reproduced, modified, transmitted, transcribed, stored in retrieval systems, or translated into any human or computer language, in any form or by any means, electronic, mechanical, magnetic, chemical, manual, or otherwise, without the express written permission of KLA, One Technology Drive, Milpitas, California 95035. KLA may revise this document at any time without notice. Rev.00 KLA Confidential SensArray ET LT Wafer User Manual This manual applies to EtchTemp Low Temperature (ET LT) Wafer only. EtchTemp Low Temperature (ET LT) Wafer is trademark of KLA SensArray. KLA reserves the right to modify, change, or improve any or all specifications published in this document without notice. Restricted Distribution 2 KLA Confidential SensArray ET LT Wafer User Manual Important Notices Warranty EtchTemp Low Temperature (ET LT) Wafer System Hardware KLA warrants that the EtchTemp Low Temperature (ET LT) Wafer Systems (Products) sold will be free from defects in material and workmanship and perform to KLAs applicable published specifications for a period of 6 months after shipment. ET LT wafer is warranted for 6 months from date of shipment, 4 measurement hours, or consumption

(whichever comes first) for failures caused by component and assembly defects. Refer to the specification provided with your wafer for the exact warranty terms. The liability of KLA hereunder shall be limited to replacing or repairing, at its option, any defective Products that are returned Free on Board (FOB) to KLA SensArray division plant in Milpitas, CA. In no case are Products to be returned without the purchaser first obtaining SensArrays permission and Returned Materials Authorization (RMA) number. In no event shall SensArray be liable for any consequential or incidental damages. Products that have been subject to abuse, misuse, accident, alteration, neglect, improper storage, or unauthorized repair or installation are not covered by this warranty. SensArray will make the final determination as to the existence and cause of any alleged defect. SensArray is not responsible for maintaining or supplying any consumable materials used in conjunction with this hardware. No warranty is made with respect to any customized equipment or Products supplied with ET LT Wafer systems where produced to Purchasers specifications except as specifically stated in writing by SensArray in the contract for such Products. The purchaser will pay the shipping costs of returned materials to SensArray; SensArray will pay the cost of shipping repaired/replaced material to Purchaser. This Warranty is the only warranty made by SensArray with respect to the Product delivered hereunder and may be modified only by a written instrument that is signed by a duly authorized officer of SensArray and accepted by Purchaser. Except as provided above, SensArray makes no warrantees, expressed or implied, including any warranty of merchantability for a particular purpose. Software KLA (SensArray division) warrants that (a) SensArray Tools software (Software) will perform substantially in accordance with the accompanying written materials for a period of 12 months after shipment, and (b) the medium on which the Software is recorded will be free from defects in materials and workmanship under normal use and service for a period of 12 months after shipment. Faults caused by unauthorized modification, misuse or abuse of products, or problems due to software not supplied by SensArray, are not covered by this Warranty. During the Warranty Period, the purchaser may return failed Software to SensArray for repair or replacement, at SensArrays option. SensArray does not warrant that the operation of the Software shall be uninterrupted or error free. The purchaser will first notify SensArray of the nature of the problem and obtain a Returned Materials Authorization [RMA] number. The purchaser will pay the costs of shipping returned Software to SensArray; SensArray will pay the cost of shipping repaired/replaced Software to the purchaser. No other warranty is expressed or implied. SensArray specifically disclaims the implied warranty of merchantability and fitness for a specific application. The SensArray Tools Software Documentation Materials (Documentation) are subject to revision and change without notice. SensArray agrees to make a best effort attempt to keep the purchaser advised of changes to the Documentation. Restricted Distribution 3 KLA Confidential SensArray ET LT Wafer User Manual Software License Agreement The Software is owned by KLA (SensArray division) and is protected by United States copyright laws and international treaty provisions. Therefore, you must treat the Software like any other copyrighted material. Under the Copyright Laws, SensArray Tools Software, or accompanying written materials, may not be copied, photo-copied, reproduced, translated, in whole or in part, without the prior written permission of SensArray. You may make one copy of the Software solely for backup or archival purposes. Third-Party Software Licenses for any software which was provided but not produced by SensArray are granted solely and only by the original supplier or manufacturer and solely and only with the suppliers limitations and rights. Copying restrictions for such software are governed solely and only by the original supplier or manufacturers license or any other supplier-

approved agreements, as applicable. Regulatory Information This equipment has been tested and found to comply with the limits for a Class B digital device, pursuant to part 15 of the FCC Rules. This equipment complies with FCC radiation exposure limits set forth for an uncontrolled environment and meets the FCC radio frequency (RF) Exposure Guidelines. Operation is subject to the following two conditions:

(1) This device may not cause harmful interference, and (2) this device must accept any interference received, including interference that may cause undesired operation. These limits are designed to provide reasonable protection against harmful interference in a residential installation. This equipment generates, uses and can radiate radio frequency energy and, if not installed and used in accordance with the instructions, may cause harmful interference to radio communications. Any changes or modifications to this device not expressly approved by the party responsible for compliance could void the user's authority to operate this equipment. This equipment complies with the FCC radiation exposure limits for general population/uncontrolled exposure. To ensure user safety and to satisfy the FCC RF Exposure requirements for mobile transmitting devices, a separation distance of 20cm shall be maintained between the device and people during operation. Trademarks ET LT Wafer and SensArray Tools are trademarks of KLA (SensArray division). Windows and Excel are trademarks or trade names of Microsoft Corporation. Any other terms mentioned in this document that are known to be trademarks or service marks have been appropriately capitalized. Use of a term in this document should not be regarded as affecting the validity of any trademark or service mark. Some of the technology used in this product is acquired under license from the management and operating contractor of the Oak Ridge National Laboratory on behalf of the U.S. Department of Energy. 4 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual Table of Contents 1. 3. 2. What You Need to Know ............................................................................................................................. 7 Conventions Used in this Manual .................................................................................................... 7 Images.............................................................................................................................................. 7 Using This Manual ...................................................................................................................................... 8 Cautions and Wafer Handlings ..................................................................................................... 8 Caution ............................................................................................................................................ 8 Wafer Handling ............................................................................................................................... 8 Document Overview ....................................................................................................................... 8 ET LT Overview .............................................................................................................................. 9 ET LT Wafer System ........................................................................................................... 9 1.1 Acquiring Data ..................................................................................................................... 9 1.2 1.3 Analyzing Data .................................................................................................................... 9 System Setup ............................................................................................................................... 10 Before You Begin .............................................................................................................. 10 2.1 Wafer Handling Procedures .............................................................................................. 10 2.2 Unpacking the System ...................................................................................................... 10 2.3 Verifying Wafer Integrity .................................................................................................... 11 2.4 Removing the Wafer from the Storage Case .................................................................... 11 2.5 Charging the Wafer Before Use ........................................................................................ 12 2.6 2.7 Setting up the Software ..................................................................................................... 12 Preparing Equipment for the Cleanroom ................................................................................... 13 Cleaning the Equipment .................................................................................................... 13 3.1 Cleaning the ET LT Wafer ................................................................................................ 13 3.2 3.3 Cleaning the AM FOUP .................................................................................................... 13 Recharging and Storing ET LT Wafer ............................................................................... 13 3.4 KLA AM FOUP .............................................................................................................................. 14 KLA AM FOUP Function ................................................................................................... 14 4.1 KLA AM FOUP indicators and Controls ............................................................................ 14 4.2 KLA AM FOUP Battery behaviour ..................................................................................... 15 4.3 AM FOUP Battery Charging .............................................................................................. 15 4.4 4.5 To Check AM FOUP Battery Level ................................................................................... 15 Using the SensArray Tools Software ......................................................................................... 17 Starting the Program ......................................................................................................... 17 5.1 Product License at Startup ................................................................................................ 18 5.2 Installing new IWC file ....................................................................................................... 19 5.3 Initial Setup Phase (Configuration) ................................................................................... 21 5.4 Step 1 To Configure the Fab hierarchy ...................................................................... 22 Step 2 To Associate People with the Fab .................................................................. 25 Step 3 To Setup Mission Recipes............................................................................... 26 Acquiring Data Using the Manual Mission ........................................................................ 27 Step 1 - Start the Application ......................................................................................... 27 Step 2 - Run a Mission .................................................................................................... 29 5.5 4. 5. 5 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual 6. 6.2 Step 3 - View Mission Data ............................................................................................. 30 Viewing Data from Previous Missions............................................................................... 33 5.6 Viewing Data from File ...................................................................................................... 33 5.7 5.8 Backing Up and Restoring the SensArray Database ........................................................ 33 Advanced Data Analysis ............................................................................................................. 35 Identifying Data to be Analyzed Using a Template ........................................................... 35 6.1 Step 1 - Create a Template ............................................................................................. 35 Step 2 - Define the Intervals of Interest for this Recipe .............................................. 36 Step 3 - Define the Parameters ...................................................................................... 37 Identifying Data to be Analyzed Using Control Limit ......................................................... 38 Step 1 - Create a Control Limit ...................................................................................... 39 Step 2 - Create a DataSet ............................................................................................... 40 Step 3 - Verify and Complete the Control Limit ........................................................... 41 To Set up Analysis Recipes .............................................................................................. 42 6.3 Go/No-Go - Validating Process Readiness ...................................................................... 43 6.4 SPC Charting .................................................................................................................... 44 6.5 Match Analyzer ................................................................................................................. 45 6.6 Profile Comparison............................................................................................................ 45 6.7 Chamber Matching ............................................................................................................ 45 6.8 6.9 Data Interpolator ............................................................................................................... 47 Importing Files and Data ............................................................................................................. 48 Step 1 - Import Data ........................................................................................................ 49 Step 2 - Select Missions ................................................................................................. 49 Step 3 - Check the Tagged Data .................................................................................... 50 Appendix -I ................................................................................................................................................. 50 To Contact SensArray supportTroubleshooting ............................................................................. 50 Glossary ..................................................................................................................................................... 51 7. 6 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual What You Need to Know This user manual assumes that you are familiar with the version of the Windows operating system installed on your computer and can perform- as a minimum - the following tasks:

Start (boot) the computer. Log on to Windows. Select from menus. Select and open files Use a mouse or pointer, including how to point and click to select objects and operate controls such as buttons. Use standard window controls such as scroll bars. Conventions Used in this Manual Several standard conventions are used in the text of this manual to make the information presented a little clearer and easier to understand. Every attempt is made to be consistent in the application of these conventions. Note:

Bold italic Highlights important additional information. Bold text indicates button names, icon names, and menu items. Italic text indicates the section and/or chapter name in a cross-reference. For example:

See the Using the Acquisition Setup Window section of Chapter 3, Acquiring Data, for more information. Italic text can also be used to emphasize a word or phrase. Courier Typeface

<Key>

Courier typeface indicates file names, directories, and text that you enter. For example:

The file is located in the C:\Sensarray\Configs directory. A word offset by angle brackets indicates a key on the computer keyboard. For example:

After you specify the parameters, press the <Enter> key. Hyperlinks By clicking on the refrence link, you can easliy move to the chapter/sections referreed. Indicates important safety information. The icon is usually associated with a caution in this document describing potential damage to the wafer. Other international standard icons specific to a particular hazard or action may be used in place of the exclamation mark. Indicates important wafer handling information. This icon is associated with a caution in the document describing potential product damage or particle contamination if the wafer is not handled according the instructions associated with the icon. Images The images shown in this document are reference only. The actual image may vary at the time of real-time operation/analysis. 7 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual Using This Manual Cautions and Wafer Handlings It is extremely important that the warnings and cautions on this page should be observed. Caution Wafer is sensitive to temperature during storage. Wafer may be damaged, and warranty voided by storing the wafer outside the recommended temperature range. Wafer should always be stored between 15 C (59 F) and 40 C (104 F). Wafer should always be stored in SensArray provided Storage Case or inside the AM FOUP. Wafer Handling Never place the wafer on an uneven surface. A small downward pressure on the wafer applied at the right point could cause the wafer to break or cause cracks within the silicon. Document Overview This manual consists of the below sections:

ET LT Overview Provides information about the features, components, and configurations of the ET LT Wafer System. System Setup Provides information about the system components, preparation of the equipment for the cleanroom, and connecting the system cables. Preparing Equipment for the Cleanroom Provides information about the cleanroom preparation for the ET LT Wafer System. KLA AM FOUP Provides information about the KLA AM FOUP function, Indicators, and controls, FOUP battery behavior, and AM FOUP charging. Using the SensArray Tools Software Provides information about the setup, acquisition features, and how to retrieve the measurement data using the AM FOUP. Advanced Data Analysis Provides information about to create templates, control limit, analysis recipes, and the SAT Analysis features. Importing Files and Data Provides information about download the data and re-tag the mission data. 8 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual 1. ET LT Overview The EtchTemp Low Temperature (ET LT) Wafer User Manual is designed for the users with a need to know use of the ET LT Wafer system with the SensArray Tools (SAT) software. This manual is applicable for ET LT wafer only. ET LT wafers will only work with SensArray Tools version 2.8.12 above (Advanced Plasma Suites). This chapter provides the information about features of the ET LT Wafer System. 1.1 ET LT Wafer System ET LT Wafer is a complete measurement system embedded with the wafer to record thermal surveys in semiconductor processing equipment without the need for wired connections. Embedding the components within the wafer allows it to be treated like a production wafer in most equipment, as long as it is within the operating temperature range of the wafer. ET LT wafer system consists of an ET LT Wafer, an AM FOUP for communicating with and recharging the wafer, a magnet network cable, a laptop computer, and a CD/Pendrive containing the software and drivers required by the system. This system can acquire data from 1 to 65 analog channels, depending on the model. Measurements taken by the sensors are converted from analog to digital signals within the onboard electronics. 1.2 Acquiring Data Using the ET LT Wafer to acquire temperature data in your equipment is a simple process. Measurement parameters, such as sensors to be used, scan rate, time delay, etc., are set up using the Controller software. The wafer is then transferred to the measurement chamber from the AM FOUP via robotic arms, and thermal survey data is acquired. The data can be retrieved from the onboard memory through the AM FOUP, once the thermal survey is complete. 1.3 Analyzing Data The data acquired by the ET LT Wafer can be analyzed using the SensArray Tools. The SensArray Tools software enables you to maximize your fabs wafer yield by capturing real-time tool conditions and identifying the performance characteristics of chambers with the highest yields. You can modify other chambers to match those characteristics, as well as monitor the tools over time, to fine-tune performance. For more information on the use of the Analysis portion of SensArray Tools, please refer to the Identifying Data to be Analyzed Using a Template / Identifying Data to be Analyzed Using Control Limit. ET LT wafer performs computations on the acquired data, such as determining the minimum, maximum, mean, range (max-min), and standard deviation of all wafer sensor values for the sample, and logs the results in columns. These computed values are referred to as calculated values. After acquiring, linearizing, and storing the sensor data, you can display or print the data as a line plot graph. In addition, you can display data in a table or as a wafer map (Refer to 5.5Acquiring Data Using the Manual Mission). 9 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual 2. System Setup Before you begin working with the ET LT Wafer system, you need to unpack the system components, prepare the equipment for transfer to the Cleanroom, and charge the wafer batteries. 2.1 Before You Begin There are safety and handling procedures that should be followed. Please read the Cautions and Wafer Handlings provided in this manual and become familiar with the ET LT Wafer before attempting your first thermal survey. Operating the ET LT wafer outside of its specified temperature range could result in unreliable readings and/or damage to the wafer. The recommended operating temperature for the ET LT wafer is 20 C to 140 C. Rotational speeds up to 5000 rpm have been tested and found to be safe. While it is possible that even higher rotational speed might be reached without damage to the wafer or spin plate, SensArray cannot provide any guarantee above 5000 rpm. 2.2 Wafer Handling Procedures ET LT Wafer is designed to survive in a semiconductor fabrication environment, care must be taken to prevent damage to the components on the wafer. Wear hand-gloves whenever you handle the wafer. Hold the wafer by the edges only or support from the backside of the wafer with your hand or with a vacuum wand. In some situations, you may have to grasp the edge of the wafer with your gloved fingers to prevent dropping the wafer, as when you try to insert the wafer into your equipment or AM FOUP. 2.3 Unpacking the System Inventory all items and compare them to the packing list included with the shipment. Retain all packaging materials for the system. This is required for the return of the ET LT Wafer for repairs. If any parts are missing or damaged, contact KLA SensArray division immediately. Be prepared to provide a list of the missing and/or damaged components, the Purchase Order Number, and the SensArray Sales Order Number. Note: Do not return the components without contacting KLA SensArray division and obtaining a Return Material Authorization. You must pack the equipment in the original packing material when returning to KLA SensArray division. Failure to properly pack the components may result in additional damage to the equipment. 10 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual 2.4 Verifying Wafer Integrity Make sure the storage case is completely closed. Place the storage case right side up (electronic module on top) on a clean working surface. On the front of the electronic module, locate the red test button

(labeled as TEST) as shown in Figure 2-1. Push the Test Button to activate the system electronics and communication. Figure 2-1 Test button and wafer indicator LEDs Upon pushing the red test button, the LCD Display on top of the Electronic Module displays the following messages:

VER Storage Case FW (Firmware) version WAFER LOCATED when a viable wafer has been found. WAFER S/N indicates the serial number of the wafer inside the storage case. WAFER BATT VOLTAGE Indicates the current wafer battery voltage. WAFER GOOD indicates the completely functioning system. The LEDs will flash to indicate the following conditions:

Flashing Blue LED indicates that the storage case received a communication packet from the wafer. Flashing Red LED indicates that the storage case is performing maintenance charging of the wafers battery. 2.5 Removing the Wafer from the Storage Case The wafer storage case is designed to keep the ET LT Wafer batteries charged to the optimum level for an extended period of 1 to 2 years. It is mandatory to check the status of the batteries and to recharge the batteries when their voltage drops below a threshold. The storage case is not designed to be used to recharge wafers after acquiring data. The storage case may not be used as a carrier station. It is used only to store the wafer when the wafer is not in use. The wafer should be kept in the storage case until it is needed. 11 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual 1. Place the horizontal wafer Storage case right side up (electronic module on top) on a clean work surface. 2. To open the storage case lid, place both thumbs on the snap rings on the lid as shown in Figure 2-2. 3. Grab the Left and Right Tabs with your pointer fingers and lift the lid completely. 4. Carefully open the lid of the storage case. 5. Carefully lift the wafer from the storage case. To replace the wafer into the storage case, follow steps 1 to 3 above to open the storage case. Then carefully place the wafer into the storage case base and close the lid. Before closing the lid, check very carefully that the wafer is correctly placed within the storage case base. Closing the lid while the wafer is positioned incorrectly can break the wafer. Figure 2-2 Opening the storage case (Top view) Figure 2-3 Opening of storage case lid for wafer removal To check the wafer health using the storage case, make sure the storage case is completely closed. If the LCD Display on top of the Electronic Module displays WAFER GOOD, it indicates the ET LT wafer is healthy. If the wafer is not healthy, the screen will indicate NO WAFER LOCATED. If the wafer is present and the module is unable to detect the wafer, place the wafer inside the AM FOUP to check the wafer status. If the wafer looks healthy in AM FOUP, then the storage case may have malfunctioned. Contact KLA SensArray division for technical support. 2.6 Charging the Wafer Before Use Place the ET LT Wafer into the AM FOUP shipped with the unit to maintain the charge on the internal batteries. Plug the laptop into the AC power supply and fully charge the laptop battery. 2.7 Setting up the Software The ET LT Wafer system normally includes a SensArray qualified laptop that has been installed with all the necessary software to set up, run, and retrieve data from the ET LT Wafer. Note: The ET LT wafer will only work with SensArray Tools v2.8.12 and above. 12 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual 3. Preparing Equipment for the Cleanroom 3.1 Cleaning the Equipment It is mandatory to follow the industry standards when installing a computer and ET LT Wafer system in the Cleanroom, and wipe down the computer, exterior of the storage case, ET LT wafer, and AM FOUP with Cleanroom wipes dampened with de-ionized (DI) water and/or isopropyl alcohol. 3.2 Cleaning the ET LT Wafer Significant efforts are made to keep the wafer clean during the manufacturing process. Due to the nature of some processes and demands by customers for cleaner wafers, the ET LT wafer is offered as a cleaned product. It has gone through an SC1 and SC2 cleaning process to remove metals and organics. The cleaned wafer is packed in a clean single polycarbonate storage case until it can be used. Despite our best efforts, the ET LT Wafer may pick up contaminants from repeated handling. The ideal method of cleaning surface contaminants from the wafer is to blow a gentle stream of Clean Dry Air (CDA) or inert nitrogen across the surface. However, some forms of surface contamination cannot be removed this easily. The wafer can be cleaned with Isopropyl Alcohol (IPA) (isopropanol/rubbing alcohol) or DI water and a cleanroom cloth. Due to the design nature of the ET LT Wafer, scratches in the coating on the backside of the wafer may exist. This has not been shown to cause degradation in the performance of the wafer. A gentle stream of DI water or IPA may be used to loosen surface contamination, and then use CDA or inert nitrogen to blow the surface to dry. Never place the wafer in an ultrasonic cleaning bath. The vibration set up by the ultrasonic may damage the electronics inside and render the wafer inoperable. Note: After a period of usage under etch environment, there will be a deposited polymer ring at the bottom surface of the wafer, this may cause the chucking problem or temperature range is not in specification. Please refer to the application note for the cleaning details for this polymer ring. 3.3 Cleaning the AM FOUP The AM FOUP can be easily cleaned by wipe down the surfaces with a cleanroom cloth dampened with IPA. No pressure is needed to remove contamination from the surface. Be sure to clean the interior of the AM FOUP. To avoid damage to the ET LT Wafer, clean the interior of the AM FOUP only when the wafer is not present. 3.4 Recharging and Storing ET LT Wafer The AM FOUP includes removable and rechargeable lithium-ion batteries and the batteries should maintain a charge on the wafer batteries for up to three years. The AM FOUP batteries can be charged via the network cable through the power adapter provided. Keep the wafer inside the AM FOUP when not making thermal surveys. This will help ensure the maximum lifetime for the onboard wafer batteries. 13 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual 4. KLA AM FOUP 4.1 KLA AM FOUP Function The KLA AM FOUP transports the instrumented wafer to the equipment during missions. It interfaces between SensArray Tools and SA wafers. It can store mission data for upto 10 hours. It also charges the wafers battery and used to store the ET LT wafers. The AM FOUP contains, one FOUP module and two SA WF chargers. 4.2 KLA AM FOUP indicators and Controls Figure 4-1 AM FOUP - Front View and Slot Map AM FOUP indicators and controls are on the rear of the KLA AM FOUP. See Figure 4-2. Figure 4-2 KLA AM FOUP indicators and controls 14 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual Control or Indicator Color Comments Wafer Charging LED Green Steady when the applicable Wafer is present but not charging (Wafer is fully charged) Blinks when the applicable Wafer is charging Orange Steady when the applicable Wafer is absent Blinks when the FOUP is charging. FOUP Charging LED Green Steady when the FOUP is powered On and at the Station but not charging (FOUP is fully charged) Reset button Manual power/

communication connector ON/OFF button Orange Steady when the FOUP is powered On but is not at the Station N/A N/A N/A To press the Reset button, insert a thin stylus or pen tip into the hole. IMPORTANT: Reset the FOUP, only if an error state Used to connect a laptop to the FOUP to perform manual missions, or provide power to a FOUP that has not been at the Station for a long time To power down the FOUP, press and hold the ON/OFF button until the FOUP Charging LED turns off 4.3 KLA AM FOUP Battery behaviour When an AM FOUPs charge level goes down to 15%, an alarm will send to the host. And the FOUP will not operate at minimal battery level. The charging pace of the FOUP is 1% in 4 minutes. Whenever the FOUP is off-charging and not in power-save mode, the battery consumption will be 1% for 15 minutes (4-5% per hour). For the Cold Start condition (FOUP connected to the SAT laptop in OFF mode), the FOUP takes 2 minutes to wake-up and communicate again. When the FOUP is on a mission, it will not go to power-save mode until the mission is completed. FOUP will not go to power-save mode until reaching low battery limit. FOUP will switch to power-save mode, when it is idle more than 30 minutes. When the FOUP is fully charged, it can stay in stocker or storage for 1 month without charging. 4.4 AM FOUP Battery Charging Check the FOUP battery every two weeks, if the FOUP is not in use FOUP needs to be charged with a magnetic connector and a power plug connecting to the wall, if the battery power is <85%. 4.5 To Check AM FOUP Battery Level 1. Connect the AM FOUP with Laptop. 2. Open the FOUP Web UI from Google Chrome; Type: http://192.168.10.100:5000. 15 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual 3. Log in to the FOUP using the following ID and Password:

You ID = admin Password = admin 4. In the FOUP Configuration page, click on Status. 5. The battery level will show, as shown in the Figure 4-3. Figure 4-3 FOUP Configuration 16 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual 5. Using the SensArray Tools Software SensArray Tools (SAT) is a software program that communicates with the ET LT Wafer through the AM FOUP. It monitors the status of the system, retrieves data from completed thermal surveys, and set-up the parameters for the next set of surveys. For setup and using SensArray Tools, refer to the SensArray Tools v2.8.12 user manual. 5.1 Starting the Program Connect the network cable between the AM FOUP and Laptop. Start the SensArray Tools application by double-clicking the desktop icon. You can see the SensArray Tools (SAT) launcher UI opens as shown in Figure 5-2. Figure 5-1 SAT Desktop icon Figure 5-2 SensArray Tools 17 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual 5.2 Product License at Startup The computer should come with a license installed. However, an error message dialog will appear (as shown in Figure 5-3) if license upgrade is required. Then click OK button. To get the Updated License Figure 5-3 License Error Message 1. Send the computers hardware ID to Support Services at customer.support-sensarray@kla-

tencor.com. The support team will send you an updated license. 2. Download the save the new license to the desired location. Use the License File Manager option to upload the new license. To add a new License 1. Click Tools on the SAT launcher menu bar, then click the License File Manager option. You can see the License File Manager window opens, as shown in Figure 5-4. Figure 5-4 License File Manager Window 2. Click Change License button. You can see the License Upgrade Wizard Add License Form File window opens, as shown in Figure 5-5. 18 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual Figure 5-5 License Form File Window 3. Click Load New File button. You can see the Choose the license to load window opens. 4. Navigate to the saved location and select the new updated license file, then click the Open button -or- double-click the new license. The license contents are listed in the License Contents panel. 5. Click Next > button. The License Upgrade Wizard - Confirm License File Change window opens. 6. Click Finish button, then close the License File Manager window. The new license is in effect. 5.3 Installing new IWC file 1. Click Tools on the SAT launcher menu bar, and select the Wafer Maintenance option, as shown in Figure 5-6. You can see the Wafer Maintenance Editor Window opens. Figure 5-6 SAT launcher window 2. Click Add Wafer button to add a new wafer. 3. Enter the Wafer Name as required. 4. Click Browse for Calibration File button, you can see a window opens. 5. Navigate and select the calibration file (.iwc extension) from the system desired location. 19 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual 6. Click Edit Sensor Pattern button to edit the sensor pattern, if required. 7. Enter Comment for the wafer added, if required. 8. Click the Save button to add the wafer. 9. You can see the added Calibration File in the Wafer Maintenance Editor Window as shown in Figure 5-7. Figure 5-7 Wafer Maintenance Editor window 10. Do the above steps to add more wafer files in the wafer maintenance editor window. Note: Refer to SensArray Tools v2.8.12 User Manual, for the configuration setup in detail. 20 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual 5.4 Initial Setup Phase (Configuration) The blow flow chart shows the SensArray Tool process flow:

Figure 5-8 SensArray Tools process flow The initial Setup phase or Configuration involves creating the fab hierarchy, setup the mission recipes used in the fab, and those associated with the fab. Before using SensArray Tools to acquire data for the first time, configure the software for the fab(s) using the following steps:

21 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual Step 1 To Configure the Fab hierarchy 1. Click Tools on the SensArray Tool launcher menu bar and then click the Configuration option, as shown in Figure 5-9. 2. You can see the configuration window will open, as shown in Figure 5-10. Figure 5-9 SAT launcher Window - Configuration 3. Click Fab to start configuring the fab. Figure 5-10 SAT Configuration window Note: The fab hierarchy will empty if this is the first time the Fab is being used. 4. Right-click in the blank area and then click the Add Customer. The Customer Information section opens, as shown in Figure 5-11. Figure 5-11 To add Customer information 22 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual 5. Enter the Customer (mandatory files) name, Location, Fab name, and Description, and then Click Save button to add the customer information. Note: Customer name should not be left blank. A pop-up message will notify Customer Name Must not be empty. Location, Fab and Description are optional. 6. Right-click the newly added customer, then click Add Tool. The Add tool section opens, as shown in Figure 5-12. 7. Enter the tool Name (mandatory field), Description of the tool, Tool Type and Bay information. Click on Save to add the new tool. Note: Tool name should not be left blank. A pop-up message will notify Name must not be empty. Description and Bay are optional. 8. Select the Tool Type as Plasma using the drop-down list, and then click Save button to add the Tool details, as shown in Figure 5-12. Figure 5-12 To add Tool information 9. If the Plasma does not available in the Tool Type drop-down list, click Add Tool Type tab to add a new Plasma tool type. 10. Click the Create New Tool Type, then enter the Tool Type Name, Station Name and Tool Type Description (optional). Click on Save to add the newly created Tool Type. See Figure 5-13. 11. You can modify the existing Tool Type using the Edit option. See Figure 5-13. 23 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual Figure 5-13 To add/edit the Tool type information 12. Right-click on the newly created Tool and then click on Add Chamber to add a new Chamber. You can see the Add Chamber section will open, as shown in Figure 5-14. 13. Enter the chamber Name and Description. Click on Save to add the newly created chamber. Figure 5-14 To add new chamber 14. Do the steps from 4 to step 13 to add additional tools and chambers, to reflect the equipment present in the fab. 15. You can Edit the Chamber properties using Edit Chamber, if they differ from the tool that was added. 16. Right click on the tool Chamber, then click on Edit Chamber. You can see the Edit Chamber Information section will open, as shown in Figure 5-15. 17. Modify the Chamber Name/Description as needed. Then click on Save to save the modification done. Figure 5-15 To modify the chamber properties 24 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual Step 2 To Associate People with the Fab After the recipes are associated with chambers, it is necessary to add the people responsible for various aspects of the fab. To Add a New Person 1. Click People from the Configuration window. You can see the People section will open, as shown in Figure 5-16. 2. Click the Click to Add Person button to add a new person. You can see the Create User window Figure 5-16 Configuration window People tab opens, as shown in Figure 5-17. Note: You can Edit or Delete the existing personnel record. Figure 5-17 Create user window 3. Complete the following information:

User Name Display Name 25 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual Notes (optional) Group Group drop-down list options are:

Technician Engineer Administrator 4. Click OK to add the user once the information entered. Do the above-mentioned steps, for all individuals who are to use SensArray Tools. At this point, the initial fab setup process is complete. Proceed to Run a Mission. Step 3 To Setup Mission Recipes It is necessary to setup the mission recipes that are to be used to run ET LT wafers, once the fab is configured. Click Recipes Flow Configurator from SAT launcher UI Mission Recipes Tab window allows the recipes to be entered and organized. Mission Recipes 1. Click Recipe Flow Configurator on the SAT launcher UI. You can see the Recipe flow configurator window opens, as shown in Figure 5-18. 2. Click the Mission Recipe tab. 3. Click the New button to create a new recipe. Figure 5-18 Mission recipes tab 4. Enter the Recipe Name, select the EtchTemp LT as a Wafer Type, and select the Trigger Type using the drop-down menu. 5. Click the Save button to add the recipe. You can see the created Mission Recipe in the Mission Recipes tab, as shown in Figure 5-19. 26 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual Figure 5-19 To create new recipe 6. You can modify the existing recipes by clicking Edit button. 7. You can copy the existing recipe using Copy button. 8. Click Deactivate to hide recipes. Note: Deactivating the recipe(s) will not delete the recipes from the list. 9. Do the steps from 3 to 8 to add more recipe(s). 10. Click on Edit to modify the existing recipe(s). 11. you can copy the recipe and its properties by clicking on Copy to create a Recipe with different name. 12. Enable Show Deactivated to view the list of deactivated recipes, as shown in Figure 5-20. 5.5 Acquiring Data Using the Manual Mission Figure 5-20 To enable the deactivated recipes The process of acquiring data, using the Manual Mission to run a mission, is comprised of the following steps:

Step 1 - Start the Application Step 2 - Run a Mission Step 3 - View Mission Data Step 1 - Start the Application 1. Click Manual Mission on the SAT launcher UI. You can see the communication window opens, as shown in Figure 5-21. 27 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual Figure 5-21 Manual Mission Controller window Waiting for device detection 2. A Laptop should have the SAT Laptop version/ Full setup installed to start with Manual Mission. 3. Wafers .iwc file should be loaded using the Wafer Maintenance Editor window. 4. Connect the network cable between AM FOUP and Laptop. The Manual Mission communication window will display the wafer map and the device information, as shown in Figure 5-22. Note: It will take 30 to 60 seconds to display the information once the ET LT wafer is connected. Proceed to Step 2 - Run a Mission. Figure 5-22 Manual Mission Controller window 28 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual Step 2 - Run a Mission 1. Select the ET LT wafer from the Select wafer for mission panel, as shown in Figure 5-22. 2. Click the Select Mission Recipe button to add a mission recipe from the Mission Recipe List, as shown in Figure 5-23. Figure 5-23 Mission Recipe List Note: The Mission Recipe list shows the pre-setup recipes which are created in Recipe Flow Configurator. 3. Or Enter the below conditions on the mission panel if the Mission Recipe is not created:

Sampling Period: The Sampling period determines the time, in 1-second increments, for each data sample. For example, 2s equals one sample every 2 seconds, 1s equals one sample every 1 second. Acquisition Time: Defines when the data acquisition starts after the launch of a mission. May be set to Max Length or Custom. Max Length results in recording data until the Sensor Wafer memory is depleted. When set to Custom, activates a drop-down box for selecting the number of seconds for mission data acquisition. The minimum custom mission time is 30sec. Select the Start Setting condition using the drop-down menu:

Leave FOUP Data acquisition starts when the wafer is left from the AM FOUP. Temperature Transient Bidirectional Temperature Transient begins the acquisition of mission data immediately with the change of temperature. (OR) The wafer will start once a temperature change of 0.3 C/sec is detected (unless there is also a delay). As mentioned above this occurs before the delay (if any) has elapsed. The internal CPU temperature is used. Both rising and falling temperatures at the specified rate will cause this to trigger. Temperature Absolute Positive Going When the positive temperature trigger is selected, a temperature drop-down box appears to select the temperature, in +1 C increments, to trigger the start of data acquisition. Temperature Absolute Negative Going - When the negative temperature trigger is selected, a temperature drop-down box appears to select the temperature, in 1 C increments, to trigger the start of data acquisition. 4. Select the Tool and Chamber using the drop-down menu to tag the mission data. 5. Make sure the ET LT wafer battery voltage ~4.05V before starting each mission. 6. Click the Run Mission button to start the mission. 7. You can see the Mission Started message appears on the top Status Bar, take the ET LT wafer from the AM FOUP, and place the wafer into the processing equipment. In the mission status panel, you can see the Mission Started message. 8. Keep the ET LT wafer at room temperature for few min before it back to AM FOUP. 9. The data will automatically be downloaded in SAT database and tagged to the selected Tool/Chamber once the wafer is returned from the processing equipment to the AM FOUP. 29 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual 10. You can see the Mission Complete information on the status bar once the data is downloaded in the SAT database, as shown in Figure 5-24. Proceed to Step 3 - View Mission Data. Step 3 - View Mission Data Figure 5-24 Mission Complete window 1. Click Data Viewer on the SAT launcher UI, then select View Data from Database (or View Data from the File menu). You can see the Mission Selection window opens. Figure 5-25 Data Viewer Window 2. Select the mission(s) to be viewed and drag it to the Selected Missions panel, then click the OK button. 3. The selected data will appear in the data viewer window, as shown in Figure 5-26. 30 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual Data Viewer 1. The left panel plots the sensor data versus time. 2. You can view the temperature graph at a time, by entering the required time on the line graph Start Point (Refer to Figure 5-26). 3. You can view the temperature graph between a time duration, by checking the Enable End Point and enter its value. 4. You can view the 2-D map and temperature graph for the required sensor profile using the drop-

down list. 5. You can toggle between the 2-D contour map, 3-D, and histogram views using the drop-down. Save or Export Mission Data Figure 5-26 Data Viewer Window The allows you to Save the Mission data (.odf file) and exports the data in a required format. 1. Click File from Data Viewer menu bar and select the required option, as shown in Figure 5-27. Figure 5-27 Save or Export Raw data 31 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual 2. Below are the options available in the File menu to Save/Export the data:

View Data - Returns to a Mission Selection window. View Data From File - Opens the Select an ODF to load window (ODF = OnWafer data file). Save Data To File - Opens a Save As window (.odf file). Export Data To Excel - Opens the Export to Excel window. Export Statistics/Graphs To Excel - Opens the Select Information to Include window. Export Graph to Image File - Opens the Save graph to file window. Movie Control You can view and export a movie clip of the selected mission using Movie Control panel and its options. 1. Click the Movie Controls tab on right-side of the Data Viewer window. You can see the movie controls panel, as shown in Figure 5-28. 2. You should select the interval limits from the available list or define the intervals by entering the Start Point and End Point values. 3. Click the Play button to view the temperature motion. You can see the movie of the temperature in the graph and 2-D map panel. 4. Click the Stop button to stop the movie wherever required. 5. Use the Step and Speed Slide bars to control the movie. 6. Click the Export button to save the 2-D map movie for references. 7. You can see the window to save the movie file (.avi format). Navigate to a desired location and then click the Save button to save the movie file. 8. Check the Include Line Chart box to export the 2-D movie along with its line chart. Figure 5-28 Movie Controls The Data Viewer enables you the following tasks:

Viewing Data from Previous Missions Viewing Data from File 32 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual 5.6 Viewing Data from Previous Missions Select View Data from the Data Viewer window, to view the data from previous missions. 1. Select View Data from Database to view data stored in the database. The Mission Selection window opens. 2. Apply various filters in the Mission Filters panel, to narrow the search. After a satisfactory selection of missions is viewed, drag one or more missions into the Selected Missions panel. 3. Information about the mission(s) is displayed in the Selected Missions panel and graphed in the panel below. Click the OK button. A Data Viewer window for each selected mission opens. 4. The left panel plots the sensor data versus time. To display the data at that time, point as a 2D or 3D graph, click the left panel. To display the data as a histogram, click the right panel. 5.7 Viewing Data from File 1. Click the View Data from ODF (OnWafer Data File). 2. You can see the Select an odf file to load window opens, as shown in Figure 5-29. 3. Navigate to the desired folder and select the odf file and click Open button. 4. The Data Viewer window will open and shows the odf file data. Figure 5-29 Select an ODF to load window 5.8 Backing Up and Restoring the SensArray Database 1. Click Tools on the SAT menu bar. Select the Configuration and click Database Operations option. 2. A Database Operation window will open, as shown in Figure 5-31. Figure 5-30 SAT Tools 33 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual Figure 5-31 Database Operation 3. Click the Backup Database tab to back up the current database from the SAT and go to my files to rename the database name. 4. Click the Create Blank Database button to create a new database in the SAT. A Warning message will appear on the screen and click Yes. 5. A blank database success message will display and click OK button to restart SAT program. Figure 5-32 Blank Database Warming message Figure 5-33 Blank Database Success message 6. Click on Restore Database to open the previous backup database. Wait for the Database Restore success message appear as shown in the below image. 7. Click the OK button to restart SAT program. Figure 5-34 Database Restore message 34 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual 6. Advanced Data Analysis 6.1 Identifying Data to be Analyzed Using a Template A template defines the regions of interest within a mission run using a specific recipe. It also defines the important statistics for each region (such as mean, range, and standard deviation). Templates are an important part of SAT analysis modules because they are used to extract key information from the raw data. This section is a guide to the template creation process. The process of identifying data to be analyzed using a template, is comprised of the following steps:

Step 1 - Create a Template Step 2 - Define the Intervals of Interest for this Recipe Step 3 - Define the Parameters Step 1 - Create a Template 1. Click Create a Template on the SAT launcher UI. You can see the Create a Template window opens, as shown in Figure 6-1. Note: The Available Templates list will empty, and no graph data is displayed, if this is the first time the utility is started. Figure 6-1 Templates - Available Templates window 2. Click Add New option to start creating a template, -or- click the Copy Selected Template option to copy an existing template. The Mission Selection window opens, as shown in Figure 6-2. It allows a choice of reference mission, which should be a good representative of mission data collected using the recipe of interest. 35 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual Figure 6-2 Mission Selection Window 3. You can filter the missions by Recipe, Fab, DataSet, Wafer ID, Date, Included Missions, Data Type, Notes, or Diameter, to limit the number of missions from which to select. Note: More than one mission can be selected for this step, to ensure that the program is able to properly analyze other missions from the same recipe. 4. Drag the selected mission to the Selected Mission list. TIP: It is not necessary to drag the mission to the Selected Missions window when selecting a single mission. Instead, select the mission to be analyzed, then click the OK button. 5. Click the Next> button after a reference mission is selected. The Templates Interval Definition window opens, as shown in Figure 6-3. Proceed to Step 2 - Define the Intervals of Interest for this Recipe. Step 2 - Define the Intervals of Interest for this Recipe The intervals of interest are periods of time within the data that contain interesting information. Typically, these are the steady-state portions of the graph, where the data is not significantly rising nor falling. 1. Click the Add button to add an interval(s). An interval defines the mission subset to be analyzed. TIP: To edit the interval start and end time, change the values in the Intervals table or on the graph. To change the values on the graph, click an interval (bordered in orange) to select it. Then press and hold the <CTRL> key while dragging a portion of the interval. Drag the beginning part of the interval to alter the start time. Drag the end of an interval to change the end time. To move the entire interval, drag the middle of the interval. 36 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual Figure 6-3 Templates - Interval Definition Window 2. Click the Preview button to see whether the intervals created are correctly matched in other missions. The preview graphs in the lower-right sector updates with the matching intervals. 3. You can remove an interval by selecting the interval then click the Remove Selected button. 4. If the selected Parameter Definition window opens, as shown in Figure 6-4. intervals are acceptable, click the Next > button. The Templates -

Proceed to Step 3 - Define the Parameters. Step 3 - Define the Parameters The final step in creating a template involves defining the values to be extracted from the data inside each defined interval. For example, during the plasma etch step, it may be important to measure the average wafer temperature and cross-wafer range. During this step, these extracted parameters are specified, and the template is named. In addition, these statistics can be extracted from a subset of the sensors, to extract regional information. For example, it may be interesting to extract the mean temperature at the edge of the wafer only, in addition to the entire cross-wafer average. 1. Click the Add New Parameter button to add a parameter. A new row appears in the Interval Parameters panel with a drop-down list for columns Interval, Statistic, and Sensor Pattern, as shown in Figure 6-4. 37 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual Figure 6-4 Templates - Parameter Definition window 2. Select the Interval to which the parameter applies. 3. Select the Statistic to calculate for the interval (the available statistic options are Mean, 3Sigma, Max, Min, Range, Median, MaxAverage, and MinAverage). 4. Select the Sensor pattern, to select the sensors to use in the calculations (the available options are All, None, Outer Ring, Inner Disc, Mask Edge, and New Pattern). By default, all sensors on the wafer are used. Note: When a sensor pattern is selected, a Sensor Pattern window opens. It is possible to edit the selected sensor pattern characteristics or load a different pattern to edit. 5. Enter the Template Name as required (on the lower-right of the window), and then click Finish button to save the template. 6. A dialog box opens to confirm template creation. Click Yes button to confirm. 7. You can see the Template Wizard window opens once the template is created. 8. Do the Step 1 - Create a Template, Step 2 - Define the Intervals of Interest for this Recipe, and Step 3 - Define the Parameters to create more templates. 6.2 Identifying Data to be Analyzed Using Control Limit The Control Limit allows limits to be associated with a template, to indicate the expected values for the calculated statistics. For example, if a recipe template calculates the mean of a steady-state period, the Control Limit for that template would specify the minimum, maximum, and average values expected for that mean. The process of identifying data to be analyzed using the Control Limit, is comprised of the following steps:

Step 1 - Create a Control Limit Step 2 - Create a DataSet Step 3 - Verify and Complete the Control Limit 38 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual Step 1 - Create a Control Limit 1. Click Create a Control Limit on the SAT launcher UI. You can see the Control Limit Editor Wizard

- Create or Edit window opens, as shown in Figure 6-5. Figure 6-5 Control Limit Editor Wizard - Create or Edit window 2. Select the Create a new Control limit or Edit an existing Control limit, and then click the Next >

3. button. You can see the Control Limit Editor Wizard - Select Template window opens, as shown in Figure 6-6. Figure 6-6 Control Limit Editor Wizard - Select Template Window 39 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual 4. Select the required template from the Available Templates list, for which the control limit is to be created. Click the Next > button, you can see the Control Limit Editor Wizard - Define Acceptance Limits window opens, as shown in Figure 6-7. Figure 6-7 Control Limit Editor Wizard - Define Acceptance Limits window 5. Define a collection of missions for the program to generate a suggested set of limits. Proceed to Step 2 - Create a DataSet. Step 2 - Create a DataSet 1. Click the Create New DataSet button. The Create DataSet window opens. 2. Select a set of missions that reflect a standard running conditions for the recipe. Enter a dataset name, then click the Save button to return to the Control Limit Editor Wizard Define Acceptance Limits window. 3. Select the created dataset from the drop-down list, to ensure it is selected. Note: Refer to SensArray Tools v2.8.12 User Manual to know how to create DataSet. 4. Examine each parameter and assign a maximum, nominal, and minimum value, to define the acceptance limits for the control limit. 5. Click the Use Suggested button to use the suggested values calculated from the dataset, as shown in Figure 6-8. 6. Click the Next > button. 7. You can see the Control Limit Editor Wizard - Summary window opens, as shown in Figure 6-9. 40 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual Figure 6-8 Control Limit Editor Wizard To set parameter values Proceed to Step 3 - Verify and Complete the Control Limit. Step 3 - Verify and Complete the Control Limit 1. Enter the Control Limit Name. Figure 6-9 Control Limit Editor Wizard Summary 2. Click the Finish button to save the Control Limit. 3. The Control Limit Editor Wizard - Summary window closes, and the SensArray launcher UI opens. 41 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual 6.3 To Set up Analysis Recipes Analysis Recipes are mainly used for automation and Chamber Matching. Follow the below mentioned procedure to setup the Analysis Recipes:

1. Click Recipe Flow Configurator on the SAT launcher UI. You can see the Recipe flow configurator window opens, as shown in Figure 6-10. 2. Click the Analysis Recipes tab. 3. This Analysis Recipe tab allows you to create a New recipe, Edit the existing recipes, Copy the recipe and to view the Deactivated Recipes. Figure 6-10 Analysis recipes window 4. Click the New button to add a new Analysis recipe. 5. Enter the Recipe Name and select the Template Name and Control Limit Name using the drop-

down menu. Select the Zones if required. 6. Click Save button to add the analysis recipe. 7. You can see the newly created analysis recipe in the Analysis Recipes list, as shown in Figure 6-11. Figure 6-11 To create new analysis recipe 42 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual 8. You can edit the existing recipe by clicking on Edit and You can copy the recipe and its properties by clicking on Copy to create a recipe with different name. 9. Enable Show Deactivated to view the list of deactivated recipes. 6.4 Go/No-Go - Validating Process Readiness This module allows you to quickly determine whether the process is within specification or not. To analyze missions with Go/No-Go, a Template and Control limit must be defined for the mission to analyze. 1. Click Go/No-Go on the SAT launcher UI. You can see the Go/No-Go window opens, as shown in Figure 6-12. Figure 6-12 Go/No-Go Home page 2. Click File from the menu and then select the Open option to select a mission to analyze. You can see the Mission Selector window opens. 3. Apply filters and select the required mission(s) to limit the number of missions from which to select. 4. Drag the missions that is to be analyzed, into the Selected Missions list. And then click OK button. 5. The Go/No-Go window opens, defaulted to the Mission Data tab. The mission is loaded, and the analysis results are presented. If the mission is within spec, the data and the Go/No-Go Status area are shaded green, as shown in Figure 6-13. 43 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual 6. If any parameters are out of spec, the data and/or the Go/No-Go Status area are shaded red, Figure 6-13 Go/No-Go Mission Statistics to alert that the mission did not pass. Notes:

The Overlay tab presents a graph of the selected mission mean, compared to the template mission mean. The Template tab presents, for reference, the original mission used for the template. The 2D Comparison tab provides surface plots of the selected and template missions. The Difference graph presents the differences between the selected mission and template. 7. To select a different interval, click a different row of the data table at the top. Selecting a different interval updates the 2D surface plots. 6.5 SPC Charting The SPC (Statistical Process Control) Charting allows you to view Control Charts, Scatter Plots, Distributions and Raw Data for multiple missions. This provides the ability for you to review trend information for a specific chamber, to ensure the chamber remains within spec over time. SPC Charting requires a template for the recipe to be analyzed. If an appropriate template is not available, refer to the Identifying Data to be Analyzed Using a Template - Step 1 - Create a Template section. Note: The Warning dialog box, some missions could not be matched to template and were removed from analysis, opens when running SPC Charting, it means:

The mission does not resemble the reference template. Click the Show Mission button in the Warning dialog box, to verify that the excluded missions do not match the template. Choose/Create a better template as a reference. Contact KLA SensArray if neither of the above actions resolve the problem. 44 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual 6.6 Match Analyzer The Match Analyzer module allows you to compare two or more chambers running the same recipe. The data provided from this module allows you to easily identify chambers that have fallen out of spec. Match Analyzer requires a template for the recipe to be analyzed. If an appropriate template is not available, refer to the Identifying Data to be Analyzed Using a Template - Step 1 - Create a Template section. 6.7 Profile Comparison The Profile Comparison module simultaneously displays Time Graph, 2D Graph and Numerical Data for two or more missions. Profile comparison requires a template for the recipe to be analyzed. If an appropriate template is not available, refer to the Identifying Data to be Analyzed Using a Template - Step 1 - Create a Template section. 6.8 Chamber Matching This feature allows you to view the mission(s) data and compare them with each other. This will allow you to review a set of missions whether historical or for multiple chambers from a single tool or a group of tools and compare the results. You can retrieve the details of mission failure and the related statistics. The Chamber Matching has the below key-features to review and analyze the mission(s) data:

Multi Mission Review:

This tab displays the mean trace of multiple missions and the golden mission template, 2D Mission Map and 2D Difference map in a scrollable list. This tab allows you to view the set of loaded missions and compare the results with each other. Figure 6-14 Multi Mission Review 45 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual Mission Review:

This tab displays a single mission mean and golden template overlay, a scrollable list of missions that show pass/fail condition, and a 2D mission and difference map. This tab allows you to view a selected mission against the golden mission. Zone Diagnosis:

Figure 6-15 Mission Review This tab displays a color-coded zone display of the chuck; red indicating a failure condition in that zone and green indicating a pass condition in that zone. This tab allows you to view more detail for the specified mission based on the zones defined by you. Figure 6-16 Zone Diagnosis 46 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual Box Plots:

This tab displays the details in a plotted box of the missions related to different temperatures of the selected interval. You can view the Box Plot for a required interval limit using the drop-down. Scatter Plots:

Figure 6-17 Box Plots This tab displays the details of the mission in a graphical representation separately for the intervals Mean, Minimum, Maximum, etc., of the template. Figure 6-18 Scatter Plots 6.9 Data Interpolator Data Interpolator allows you to compare different products mission data and interpolate the same with different set of sensor locations and for the required intervals by specifying the Start Point and End Point. More accurately it is interpolating to measurement locations used by another data source. This allows direct comparison for data which does not align with our products sensor locations. You can preview and save the interpolated data file for future reference. 47 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual Figure 6-19 View of interpolated data 7. Modify Existing Tags in the Database Figure 6-20 Job completed window A data tag is a set of metadata for a mission. This metadata includes the name of the person who collected the data, the chamber and recipe upon which the mission was run, the date the mission was run, and notes. The information for the metadata tags are the inputs during Fab Configuration. The Data Importing and Tagging module is used to import legacy data formats and modify existing data tags. Legacy data is saved to the SensArray Tools database and a data tag is created for each file imported. Legacy formats currently include OnWafer data files (WFR), SensArray Excel files (XLS, TXT), and AE Pilot wafer data (CSV). Note: Use files with the proper file extension (such as, CSV, TXT, WFR, XLS), in a location accessible by SensArray Tools. 48 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual The process of importing data is comprised of the following steps:

Step 1 - Import Data Step 2 - Select Missions (to import missions that were previously tagged and saved) Step 3 - Check the Tagged Data Step 1 - Import Data 1. Click Data Importing and Tagging module on the SAT launcher UI. The Data Import - Select Desired Action window opens, as shown in Figure 7-1. Figure 7-1 Data Import To Select Desired Action 2. Select the Modify Existing Tags in the Data Base and click the Next > button. 3. You can see the Mission Selection window opens. Note: If an option was not selected, a Warning dialog box opens with a message to select one of the options. Step 2 - Select Missions 1. Apply filters in the Mission Filters panel and select the mission(s). 2. Click Next > button. 3. You can see the Mission Recipe List opens, as shown in Figure 7-2. Figure 7-2 Data import Mission Recipe List 4. Select recipe from the Mission Recipe List, then click Accept button. 5. You can see the Data Import - Summary window opens and contains the list of all data tags that were Re-tagged, as shown in Figure 7-3. 49 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual Step 3 - Check the Tagged Data Figure 7-3 Data import Summary The Summary page table lists all data tags that were added or updated. 1. Click the < Back button and correct it if any information is incorrect. 2. Click the Finish button if the data is correct. The SAT UI opens. Note: If there is a problem with the re-tagged data, a Warning dialog box opens, listing the problem parameters, and the Launch Go/No-Go window points that the out-of-spec information. Correct the information before proceeding. Appendix -I To Contact SensArray supportTroubleshooting report bugs or To customer.support-sensarray@kla-tencor.com. requests submit for additional functionality, send an email to Include the following information within the email message:

Description of the problem or request (be specific). Exact wording of the error message(s) received and process steps that led to the error. If the error dialog box includes a Details button, include a text file of the text that appears when the Details button is clicked. TIP: Copy the Details text to the Windows Clipboard, then save to a Microsoft WordPad file. Supporting files (for example, screen captures, mission data, and so forth) TIPS:

Screen Captures. Press <ALT>+<Print Screen> to copy the Error dialog box to the Windows Clipboard, then paste into Microsoft Paint and save as a GIF or JPG file, or into the same Microsoft WordPad file that includes the message details. Mission Data. To save mission data, use the File Save As File from the Data Viewer window to export an ODF file. Your name, company, location, telephone number, and email address Support staff will respond to the request as soon as possible. 50 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual Glossary Acquisition Time. Total mission time in seconds; the amount of time it takes a process (plasma recipe) to run. Boxplot. Method for showing different types of data populations; the spacing between the various parts of the box help indicate variance, skew, and identify out-

of-specification values. Critical Dimensions (CDs). Width of a patterned line or the distance between two lines, monitored to maintain device performance consistency; also, the dimension of a specified geometry that must be within design tolerances. Control limit. Allows numbers to be associated with a template, to indicate the expected values for the calculated statistics. For example, if a template for a recipe calculated the mean of a steady-state period, the control limit for that template would specify the minimum and maximum values expected for that mean. Data Tag. Set of metadata for a mission, which includes the name of the person who collected the data, the chamber and recipe upon which the mission was run, the date the mission was run, and notes. Data Viewer. Allows viewing of data from the current mission run or from previously saved data, and to start the Mission Controller and Smart Device Control Center to run new missions. Dataset. Collection of missions for the program to generate a suggested set of limits. Dongle. Infrared device used to communicate with a wafer contained in a wafer carrier. Etch. Process for removing material in a specified area through a wet or dry chemical reaction or by physical removal, such as by sputter etch. Fab Configurator. Part of the SensArray Tools software that allows you to represent the fab so that PlasmaSuite can monitor the fab. Fabrication. processes. Integrated circuit manufacturing Fabrication Yield. Percent of wafers arriving at wafer into sort compared with the process. the number started rules, specifications, Flow. Computer program, operations, are which organized in steps and are performed each time to produce/process a wafer. procedures, and FOUP. Front-Opening Unified Pod. Docking station used for storing, protecting, loading, and unloading wafers, as well as communicating with and recharging Integrated Wafers. Go/No-Go. Determines whether a mission is within specification. display Histogram. Graphical tabulated frequencies; a graphical version of a table that shows what proportion of cases fall into each of several or many specified categories. The histogram differs from a bar chart in that it is the area of the bar that denotes the value, not the height. of Import. Process of loading data sets (files) into the SensArray Tools database. Available by selecting Data from the Configuration menu on the PlasmaSuite window. Importing and Tagging Interval. Defines the portion of the recipe to be compared and analyzed. Match Analyzer. Compare relevant statistics between multiple chambers. Mean Temperature. Arithmetic mean/average of two or more channels over a specific time slice. Median Temperature. Middle value of two or more channels over a specific time slice. Mission. One set of data collected by a sensor wafer. The mission specifications are set by using the Mission Controller or Smart Device Control Center. Manual Mission Controller. Software that allows you to set up and run missions to gather fab data for analysis. Mission Filters. Apply filters to narrow the number of missions selected for comparison. Missions can be filtered by Recipe, Fab, DataSet, Wafer ID, Date, Included Missions, Data Type, Notes, and Diameter. Parameters. Defines the statistics to be calculated for the selected template interval, and the pattern of sensors to use in the calculations. Plasma. High-energy gas made up of ionized particles. Plasma Etch. Dry-etch process using reactive gases energized by a plasma field. Plasma Fab Hierarchical Levels. These consist of customer, location, fab, bay, tool, and chamber. Plasma Recipes. Processes used to run PlasmaSuite sensor wafer products. PlasmaSuite. SensArray Tools analyzing plasma etch fab performance. software for Profile Comparison. View multiple missions. 2D profiles of Recipe. Computer program, rules, specifications, operations, and procedures, which are organized in steps and are performed each to produce/process a wafer. Used in PlasmaSuite. Each chamber fab must have a recipe in associated with it. time the Recipe Step. Single action within a recipe. 51 Restricted Distribution KLA Confidential SensArray ET LT Wafer User Manual Sample Rate. Speed of acquisition during data collection. For example, a sample rate of 2 means that data will be collected from all sensors on the wafer every 2 seconds. Scatter Plot. Chart that uses Cartesian coordinates to display values for two variables. Data is displayed as a collection of points, each having one coordinate on the horizontal axis and one on the vertical axis. Sensor. Device that responds to an environmental variable (such as temperature). Sensor Pattern. Select the sensors to be used in calculating template parameters during a mission run. Available options are All, None, Outer Ring, Inner Disc, Mask Edge, and [new pattern]. By default, all sensors on the wafer are used. Smart Device Control Center. Software that allows you to set up and run missions to gather fab data for analysis. Used with 3rd generation SmartFOUP360ez and SmartBOXez devices. SPC (Statistical Process Control) Chart. Tool used to determine whether a manufacturing or business process is in a state of statistical control or not. If the chart indicates that the process being monitored is not in control, the pattern it reveals can help determine the source of variation to be eliminated to bring the process back into control. A control chart is a specific kind of run chart. Steady State. Stable condition that does not change over time, or in which change in one direction is continually balanced by change in another. Tag, Tagging. Set of metadata for a mission. This metadata includes the person who collected the data, the chamber and recipe on which the mission was run, the date the mission was run, and notes. Template. Defines the regions of interest within a mission run using a specific process. It also defines the important statistics for each region (such as mean, range, and standard deviation). Identifies critical intervals for a production, monitoring, or diagnostic process. USB (Universal Serial Bus). Replaces various kinds of serial and parallel port connectors with one standardized plug and port combination. Connect USB-compliant devices (for example, the provided portable computer), by way of a USB cable connected to then power-on the devices. the devices USB port(s), Wafer. Thin round slice of a semiconductor material from which chips are made. Wafer Carrier. Used to protect wafers during the wafer fabrication. Wafer Fabrication. Series of manufacturing operations that places the circuit or device in and on the wafer. 52 Restricted Distribution KLA Confidential KLA Confidential

FCC ID: QTA-SCLC SensArray Storage Case LC 300 Model Number:

SCLC300 KC ID: R-R-1KT-SCLC300

, CLASS A

, CLASS A

. , This device complies with part 15 of the FCC Rules. Operation is subject to the following two conditions: (1) This device may not cause harmful interference, and (2) This device must accept any interference received, including interference that may cause undesired operation.

FCC ID: QTA-SCLC SensArray Storage Case LC 200 Model Number:

SCLC200 KC ID: R-R-1KT-SCLC200

, CLASS A

, CLASS A

. , This device complies with part 15 of the FCC Rules. Operation is subject to the following two conditions: (1) This device may not cause harmful interference, and (2) This device must accept any interference received, including interference that may cause undesired operation.

Federal Communications Commission Authorization and Evaluation Division 7435 Oakland Mills Road Columbia, MD 21046 USA Date: 03-01-2023 FCC ID: (QTA-SCLC) Ref. #1: Attestation Statements Part 2.911(d)(5)(i) Filing

[KLA Corporation] (the applicant) certifies that the equipment for which authorization is sought is not covered equipment prohibited from receiving an equipment authorization pursuant to section 2.903 of the FCC rules. Ref. #2: Attestation Statements Part 2.911(d)(5)(ii) Filing

[KLA Corporation] (the applicant) certifies that, as of the date of the filing of the application, the applicant [ is not] identified on the Covered List as an entity producing covered equipment. Cover List Link: (https://www.fcc.gov/supplychain/coveredlist) Sincerely, Applicant: KLA Corporation Address: 7 Technology Dr, Milpitas, CA 95035 Contact Person: Giampietro Bieli (Authorized representative of SensArray Division, KLA Corporation) Tel.: +1(408) 875-2719 Email: Giampietro.Bieli@kla-tencor.com Rev 2/6/2023

BIU/RIEVAWU LVERITAS |

775 Montague Expressway Milpitas, CA 95035 Tel: 408-526-1188 Fax: 408-526-1088 Email: certification@bureauveritas.com Website: httos:/Awww.cps.bureauveritas.com/

Confidentiality Request Letter Revision Histo Approved Date Reason for Amendment (current / obsolete) From To Initial Release (obsolete) 1.0 1.0 Nov-14-2006 Adding CFR 2.459 (obsolete) 1.0 2 August - 11 - 2008 Updated company template & Added text box 2.0 3.0 Jan-31-2012

(obsolete) Added IC confidentiality letter form (obsolete) a 3.0 4.0 March-26-2015 Corrections to STC form. Added reference to KDB 4.0 5.0 Nov-19-2015

(obsolete) Updated company logo (current) 5.0 6.0 Jun-26-2019 Updated References and Contact Info 6.0 7.0 Aug-30-2020 SCS-F019: Confidentiality Request Letter Page | of 2 Rev 7.0 ALA fe 1110712022 To:

Federal Communications Commission Authorization and Evaluation Divi 7435 Oakland Mills Road Columbia, MD 21046-1609 Ce:

Bureau Veritas Consumer Products Services Inc. 775 Montague Expressway Milpitas, CA 95035 Subject: Confidentiality Request for FCC ID: QTA-SCLC Pursuant to CFR 47 sections 0.457 and 0.459, we respectfully request permanent confidential treatment of the following Exhibits accompanying this application be held confidenti Type of Confidentiality Requested Exhibit O Short Term X Permanent Block Diagram X Short Term (Permanent External Photos X Short Term (Permanent External Internal Photos O Short Term X Permanent Operational Description Theory of Operation DO Short Term O Permanent Parts List D Short Term 0 Permanent Tune-Up Procedure O Short Term X Permanent Schematics X Short Term, OD Permanent Test Setup Photos X Short Term O Permanenti User's Manual The above materials contain trade secrets and proprietary information not customarily released to the public. The public disclosure of these materials may be harmful to the applicant and provide unjustified benefits to its competitors. Permanent Confidentiality:

The applicant requests the exhibits listed above as permanently confidential be permanently withheld from public review due to materials that contain trade secrets and proprietary information not customarily released to the public. Short-Term Confidentiality:

To avoid premature release of sensitive information prior to marketing or release of the product to the public, the applicant requests the following documents contained in this certification application be temporarily withheld from public disclosure for an initial period of 45 1]

or 180 X days; or for a specified date of not to exceed 180 days from the Grant Date The applicant understands that disclosure of this application and all accompanying documentation will not be made before the date of the Grant for this application. Sincerely, Client's signature:

Client's name & title: Giampietro Contact information / address: 7 Technology Drive. M General Manager itas, CA 95035 Permanent confidentiality may be requested in accordance with FCC KDB 726920 SCS-F019: Confidentiality Request Letter Page 2 of 2 Rev 7.0

KLA Corporation One Technology Drive Milpitas, CA 95035www.kla.com Declaration of Model Differences Letter Applicant: KLA SensArray Product name: Storage Case Large Coil/ Carrier Station Large Coil Brand: KLA SensArray Model:

Model Name Model Number STORAGE CASE LC 300/ STORAGE CASE LC 200 SCLC300/ SCLC200 CARRIER STATION LC 300/ CARRIER STATION LC 200 CSLC300/ CSLC200 Please refer to model difference as below. Circuit board layout, component models are exactly the same.

1 2 3 4 5 6 7 8 Product Characteristics:

Radio Frequency Operating Range(s) RF Power / Field Strength Radio Frequency Circuitry Antenna Characteristics Associated Digital Circuitry Functional Capabilities Cosmetic/Dimension Differences Case Design/Materials Products are:

Same Different X X X X X X X X For any differences, a description is provided in the table below.

1 2 Description of differences:

STORAGE CASE LC 300/ STORAGE CASE LC 200 and CARRIER STATION LC 300/ CARRIER STATION LC 200 are cosmetically different. STORAGE CASE LC 200/300 and CARRIER STATION LC 300/ CARRIER STATION LC 200 use the same RF PCA, and the difference are related with non-

RF modules. The difference between them impose no deviation in their RF aspect, and hence, there applies no change to RF test results KLA Corporation One Technology Drive Milpitas, CA 95035www.kla.com Name and position: Giampietro Bieli, General Manager Name of Applicant: KLA SensArray Address: 7 Technology Drive. Milpitas, CA 95035

Corporate Office One Technology Drive Milpitas, CA 95035www.kla.com August 22,2022 To whom it may concern, Limited Power of Attorney Please be advised that the undersigned, Brian Haas of KLA Corporation (KLA) is lawfully authorized to represent and act on behalf of the said company, whose registered address is One Technology Drive, Milpitas California 95035 and does hereby appoint, Giampietro Bieli, General Manager of KLAs SensArray Division, to act on behalf of KLA strictly as may be necessary in connection with the completion, submission, and execution of all documentation and fulfillment of all processes required by the Federal Communications Commission (FCC) and in support of FCC registration and approval of SensArray products in compliance with all laws, directives, and regulations of the country where SensArray products are sold, including but not limited to, electromagnetic compatibility, equipment RF communication authorization, and product safety (the SensArray Product Compliance Project). The applicant further certifies that neither it nor any party named in this Limited Power of Attorney is subject to a denial of federal benefits that includes FCC benefits pursuant to Section 5301 of the Anti-Drug Abuse Act of 1988, 21 U.S.C. 862. This Limited Power of Attorney is limited to the SensArray Product Compliance Project specifically set forth herein and shall not in any way be considered or construed as a general power of attorney. This power commences upon the date hereof and shall continue until revoked in writing by an authorized representative of KLA Corporation. If there are any questions regarding this Limited Power of Attorney, please contact Brian Haas of KLA Corporation directly via email at brian.haas@kla-tencor.com or +1(408) 875-0488. Sincerely, Brian L. Haas, PhD Vice-President, Central Engineering KLA Corporation, Global Products Group

775 Montague Expressway Milpitas, CA 95035 Tel: 408-526-1188 TB IUIRIEVALUn| Fax: 408-526-1088

;VERITAS | Email: certification@bureauveritas.com Website: https:/Avww.cps.bureauveritas.com/

Project and Product Certification Representative Authorization Letter Revision History Reason for Amendment (current / obsolete) From To Approved Date Initial Release (obsolete) 1.0 1.0 Nov-14-2006 Revised wording (obsolete) 1.0 : 2.0 Sept-25-2007 Updated company template (obsolete) 2.0 3.0 Jan-31-2012 Updated letter information (obsolete) 3.0 4.0 May-23-2014 Added FCC ID field (obsolete) 4.0 5.0 Sep-16-2014 Updated company name & logo (current) 5.0 6.0 Jun-27-2018 Updated References and Contact info 6.0 7.0 Aug-30-202 SCS-F018: Project and Product Certification Representative Authorization Letter Page 1 of 2 Rev 7.0 ALA 11/07/2022 To: BVCPS, INC. 775 Montague Expressway, Milpitas, CA 95035 USA Dear Sir/Madam, Re: Product Certification Representative Authorization Letter We, _ KLA SENSARRAY. hereby authorize Bureau Veritas Consumer Product Services, Inc. to act as a Certification Body for certifying for the following project(s):

FCC ID: QTA-SCLC Product Description: STORAGE CASE LARGE COIL Model:

Model Name Model Number Storage Case LC 300 SCLC300 Storage Case LC 200 SCLC200 Sincerely, Client's signature Client's name / Title Giampietro Bieli/ General Manager Contact information / Address 7 Technology Drive. Milpitas, CA 95035 SCS-F018: Project and Product Certification Representative Authorization Letter Page 2 of 2 Rev 7.0