Families PHOENIX Product Lines PHOENIX Models All models that use wafers AML User Guide Document Number:
9026908-000 Revision:
AA Status:
Released Distribution Type:
Internal Use Only Revision History: KLA requires users of this document to make sure they use the latest released version. The details of the Revision History are located on the final page of this document. Table of Contents 1. 2. 3. 4. 5. 6. 7. 8. 9. 1.1. 1.2. 3.1. 3.2. 3.3. 4.1. 4.2. 4.3. 9.1. 9.2. 9.3. 9.4. 9.5. 9.6. Overview: AML User Guide.................................................................................................... 3 AML: Equipment Description............................................................................................... 4 AML: Leveling UI................................................................................................................. 5 Safety: AML User Guide.......................................................................................................... 7 Prepare to Check Leveling Using the AML............................................................................. 8 Power Up the AML................................................................................................................8 Start the Leveling UI and Select the Tool.............................................................................. 8 Calibrate the AML............................................................................................................... 11 Check Leveling Using the AML.............................................................................................12 Check the Leveling (Absolute Mode)..................................................................................13 Check the Leveling (Relative Mode)...................................................................................17 Use the AML as a Digital Level (QuickLevel)....................................................................21 AML: View History................................................................................................................ 23 AML: Add a New Tool........................................................................................................... 26 AML: Change the Spec...........................................................................................................28 AML Troubleshooting............................................................................................................ 30 Additional Information........................................................................................................... 33 Glossary............................................................................................................................... 33 Revision History: AML User Guide.................................................................................... 33 Copyright............................................................................................................................. 34 Trademarks...........................................................................................................................34 Reprint Acknowledgments...................................................................................................34 Branding Changes................................................................................................................34 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 2 of 34 Overview: AML User Guide 1. The AML is a leveling wafer tool that works with a dedicated laptop or tablet, or with the FEC of the tool whose leveling is being checked. Throughout this Guide, "computer" refers to whichever option you are using: laptop, tablet, or FEC. The AML can be used:
To check the leveling status of stations As a digital level during the leveling process of a station In addition, the results of earlier leveling sessions can be viewed on the computer. A typical work flow:
1. Run a leveling session for the tool to check the leveling statuses of the target stations. 2. If the leveling for any station is out of spec, run a QuickLevel session for that station and adjust the leveling until the station is within spec. 3. Run a second leveling session for the tool to confirm that the stations are now in spec and to keep a record of the results. FRU Parts/Tooling Required Part Number Description Quantity FRU/Tooling 0749246-00x ASSY,FINAL,CAL,AM WAFER,2.5MM,EXTND BATT
(includes AML and charging shell) One of the following options:
0764100-00x KIT,DONGLE,SW-UI,W/CASE,AML (dongle for use with FEC) 0764553-00x KIT,LAPTOP,DONGLE,W/CASE,AML (laptop plus dongle option) 0764099-00x KIT,TABLET,SW-UI,W/CASE (tablet option) 1 1 1 1 Tooling Tooling Tooling Tooling Required Documents Document Number Title 9026876-000 AML Router Configuration 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 3 of 34 1.1. AML: Equipment Description The AML system consists of the following:
The AML (leveling wafer) The AML charging shell, including power supply The AML router (dongle) that is installed on the computer
(optional) Dedicated laptop computer or tablet Equipment Rating Equipment AML charger output AML charger input Rating 5V max 1A max 12VDC max 3.3A max The AML wafer is for use only with batteries that have built-in protection. Wafer batteries must not be replaced by an operator. 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 4 of 34 Input and Output Ports Equipment AML wafer Equipment AML wafer Environmental Conditions Ports 3.7V input (from battery) Environmental Parameter Condition Temperature Pressure 0C - 60C 760 Torr (atmospheric only) Air, CDA AM Leveling Charger Temperature 0C - 85C Clean the AML wafer only with a lint-free cloth dampened with water and IPA in a 10:1 ratio. Supplier and Manufacturer Name Address Supplier SensArray division of KLA Corporation One Technology Drive Milpitas, California 95035 Manufacturer Flex Ltd. HaMatechet 2 USA Israel Migdal HaEmek 2307037 1.2. AML: Leveling UI This section gives an overview of the 2 primary windows of the Leveling UI: the main window and the Leveling window. For operational information, refer to the sections of the document that discuss the task you want to perform. Main Window:
9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 5 of 34 If the AML is connected to the computer, the wafer status is displayed at the top of the window. The main window lists every tool that has been defined on the computer, including the pre-defined QuickLevel (used when using the AML as a digital level). The right side of the window has 2 tabs:
Preview (default): Displays the results of the last session for the selected tool Tool: Shows which stations are defined for the selected tool 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 6 of 34 Leveling Window:
2. Safety: AML User Guide Warning: Cut and Sever Hazard Consequence:
Sharp objects could result in serious injury or death. Mitigation:
Keep hands and arms clear. Turn off and lockout the subsystem before servicing. Handle the AML with care. If the AML breaks, the broken pieces can be a cut or sever hazard. 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 7 of 34 3. Prepare to Check Leveling Using the AML 3.1. Power Up the AML Steps to follow charging shell. 1. Open the charging shell. 2. Install the AML in the charging shell so that the notch of the AML aligns with the notch of the 3. Close the charging shell. 4. Connect the power supply cable to the charging shell. Result: The AML beeps, indicating that it is powered up. 5. Remove the AML from the charging shell. 3.2. Start the Leveling UI and Select the Tool The external AML dongle was configured on the computer (refer to 9026876-000, AML Router Required conditions Configuration) The AML was powered up. 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 8 of 34 Steps to follow 1. Install the AML dongle in the USB port that was used when the AML router was configured on the computer. If the dongle is not installed in the USB port that was used when the router was configured, the AML UI might not function. 2. Power up the computer (unless it is already powered up). 3. On the computer, start the Leveling UI (unless it is already running):
The specific steps depend on the computer's Operating System (OS): Windows 7 or Windows 10. OS Step(s) Windows 7 Double-click Leveling App. Windows 10 a. Right-click Leveling App. b. Select More > Run as administrator. Result: The Leveling UI opens. 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 9 of 34 4. In the Leveling UI, click the Leveling button that corresponds to the Tool Name. If you are going to use the AML as a Digital Level, click the Leveling button that corresponds to QuickLevel. Troubleshooting: If the tool is not listed, add a new tool. 5. If a previous session for that tool was not completed, the system asks whether you want to resume that session or start a new session. Click New session or Resume, as applicable. 6. Make sure the leveling window shows that the AML is in ABS (Absolute) mode. If the AML is in Absolute mode when the session begins, it has been calibrated. Troubleshooting: If the leveling window does not display ABS, the AML is not calibrated. Refer to Calibrate the AML. 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 10 of 34 Postrequisites
(Absolute Mode). To check the absolute leveling of one or more stations, continue with Check the Leveling To check the leveling of one or more stations relative to another station, continue with Check the To use the AML as a digital level during the leveling process of a station, continue with Use the Leveling (Relative Mode). AML as a Digital Level (QuickLevel). 3.3. Calibrate the AML Required conditions The AML was powered up. The Leveling UI was started. A tool was selected from Tool List. The AML has not been calibrated after power up. About this task The AML must be calibrated after power up. After it is calibrated, it is in Absolute mode. Steps to follow 1. Place the AML on a flat, solid surface. The surface must be flat within 5. 2. In the Leveling UI leveling window, click Calibration. 3. At the prompt, click OK. 4. Mark the exact location of the AML on the flat surface. In the next step, you must keep the center of the AML in the same place. 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 11 of 34 CAUTION: Equipment Damage Consequence:
Not following the procedure can damage the system. Mitigation:
Follow all instructions below. The 0 calibration and the 180 calibration must be performed while the AML is in the same place on the surface. If the AML is not in the same place, the calibration will not be accurate and the leveling performed using the AML will not be accurate. 5. While keeping the AML in the same place on the flat surface, rotate the AML 180. 6. Click OK. Result: The AML is calibrated and the Leveling UI shows it is in Absolute mode. Postrequisites
(Absolute Mode). To check the absolute leveling of one or more stations, continue with Check the Leveling To check the leveling of one or more stations relative to another station, continue with Check the To use the AML as a digital level during the leveling process of a station, continue with Use the Leveling (Relative Mode). AML as a Digital Level (QuickLevel). 4. Check Leveling Using the AML Required conditions On the main Leveling UI page, the applicable tool's Leveling button was clicked. 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 12 of 34 The Leveling UI displays ABS, showing that the AML is calibrated. 4.1. Check the Leveling (Absolute Mode) About this task In Absolute mode, the AML checks the leveling of each station individually. After the AML is calibrated, it is in Absolute mode by default. 1. Place the AML on the first station so that the notch faces away from you (in the "12 o'clock"
Steps to follow position). 2. In the Leveling UI, click the station. 3. Click Play. Result: The results for the station are displayed numerically and graphically. 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 13 of 34 4. Click Pause. 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 14 of 34 5. Repeat for all the other stations you need to check. 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 15 of 34 6. To add comments about the leveling session:
a) Click Add a Note. b) Write the comments. 7. At the end of the leveling session, click Complete. 8. At the prompt, click OK. 9. To return to the main Leveling UI window, click Back. 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 16 of 34 4.2. Check the Leveling (Relative Mode) About this task Checking leveling in Relative modes has two parts:
1. Checking the Reference station in Absolute mode. 2. Changing to Relative mode to measure the subsequent stations with X and Y offsets defined by the leveling values of the Reference station. Steps to follow 1. 2. Place the AML on the reference station so that the notch faces away from you (in the "12 o'clock" position). In the Leveling UI, click the station. 3. Click Play. Result: The results for the station are displayed numerically and graphically. 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 17 of 34 4. Click Pause. 5. Click Relative. 6. At the prompt, click OK. Result: The Leveling UI goes into REL (Relative) mode and displays the X and Y offsets that will be used during the session. 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 18 of 34 7. Measure the other stations relative to the reference station:
a) Place the AML on the first station to measure relative to the referece station. b) In the Leveling UI, click the station. c) Click Play. Result: The results for the station relative to the reference station are displayed numerically and graphically. d) Click Pause. 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 19 of 34 e) Repeat for the other stations you want to check. 8. To add comments about the leveling session:
a) Click Add a Note. b) Write the comments. 9. At the end of the leveling session, click Complete. 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 20 of 34 10. At the prompt, click OK. 11. To return to the main Leveling UI window, click Back. 4.3. Use the AML as a Digital Level (QuickLevel) About this task The QuickLevel leveling window displays a single, generic station, which displays the results for whichever station you are adjusting. Steps to follow o'clock" position). 1. Place the AML on the station you are adjusting so that the notch faces away from you (in the "12 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 21 of 34 2. Click Play. Result: The X and Y results for the station are displayed numerically and graphically. 3. Adjust the leveling of the station until the display shows the leveling is within spec. 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 22 of 34 4. Click Pause. 5. Repeat for all the other stations you need to adjust. 6. At the end of the leveling session, click Complete. 7. At the prompt, click OK. 8. To return to the main Leveling UI window, click Back. 5. AML: View History About this task It is not necessary to connect the AML to the computer in order to view History. Steps to follow 1. Power up the computer (unless it is already powered up). 2. On the computer, start the Leveling UI (unless it is already running):
The specific steps depend on the computer's Operating System (OS): Windows 7 or Windows 10. 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 23 of 34 OS Step(s) Windows 7 Double-click Leveling App. Windows 10 a. Right-click Leveling App. b. Select More > Run as administrator. Result: The Leveling UI opens. 3. To view the results of a tool's last session, click the tool. In the example in the figure, A500 is clicked. 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 24 of 34 Result: The results of the tool's last session are displayed in the Preview tab. 4. To view the results of an earlier session:
a) In the Leveling UI, click the Leveling button that corresponds to the tool. b) Under History, click the session that you want to view. Result: The results for the selected session are displayed numerically and graphically. 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 25 of 34 6. AML: Add a New Tool Steps to follow 1. Power up the computer (unless it is already powered up). 2. On the computer, start the Leveling UI (unless it is already running):
The specific steps depend on the computer's Operating System (OS): Windows 7 or Windows 10. OS Step(s) Windows 7 Double-click Leveling App. Windows 10 a. Right-click Leveling App. b. Select More > Run as administrator. Result: The Leveling UI opens. 3. In the Leveling UI, click Add New Tool. Result: The Add New Tool pane opens on the right side of the window. 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 26 of 34 4. Type the name of the new tool. In the example in the figure, the name of the new tool is A700. 5. Select the stations to be included in the tool definition:
When a station is included in a tool definition, it is included in the list of stations whose leveling can be checked by the AML during the leveling operation. a) Click the stations to include in the tool definition. Result: The indicator next to the selected station changes from red to green. b) When you select a Loadport, you are prompted to select one or more slots. If you select a slot, then the selected slot in a FOUP on the Loadport is a defined station of the tool. If you select more than one slot, then each Loadport/slot combination is its own defined station of the tool. If you do not select any slots, then the defined station is the Loadport itself. To view additional slots, use the scroll bar. In the example in the figure, slots 1 and 5 of Loadport 1 are selected. 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 27 of 34 c) To add a station that is not listed:
1. In Name new station here, type the name of the new station. 2. Click + (Add). In the example in the figure, the name of the new station is Flipper. Result: The new station is added to the list of stations and another Name new station here field is displayed. d) When you have selected all the stations you want to include in the tool definition, click Done. Result: The name of the new tool is listed in the Tool Name column of the main Leveling UI window. 7. AML: Change the Spec About this task The default leveling spec of the Leveling UI is 0.2 calculated as absolute surface degrees (a combination of the two axes), and the default precision is 2 decimal places. These settings can be changed in the Settings window. The precision can be either 2 decimal places or 3 decimal places. The Leveling UI does not impose a limit on the value of the leveling spec. It is not necessary to connect the AML to the computer in order to change the spec. 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 28 of 34 Steps to follow 1. Power up the computer (unless it is already powered up). 2. On the computer, start the Leveling UI (unless it is already running):
The specific steps depend on the computer's Operating System (OS): Windows 7 or Windows 10. OS Step(s) Windows 7 Double-click Leveling App. Windows 10 a. Right-click Leveling App. b. Select More > Run as administrator. Result: The Leveling UI opens. 3. Click Settings. Settings is located in the top right of the Leveling UI. Result: The Settings dialog opens. 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 29 of 34 4. Change the spec:
a) Type the new value for the Leveling spec. b) (Optional) Change the value for Number Of Decimal Digits [2-3]. c) Click Save. Do not change the SSID, otherwise the AML will not be able to communicate with the computer. 8. AML Troubleshooting Symptom / Problem Cause Fix The AML does not connect to the UI The AML is not powered up
(the LED is not blinking) Power Up the AML The IP address is incorrect. The correct IP address is 192.168.100.1. In a CMD window, run ipconfig to check the IP address. If the IP address is incorrect, refer to Correct the Static IP Address below. The AML needs to be reset. Refer to Reset the AML below. The AML battery needs to be charged. Refer to Power Up the AML and charge the AML for 2 hours. Correct the Static IP Address 1. Open the computer's Control Panel. 2. Click Network and Internet. 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 30 of 34 3. Click Change adapter settings. 4. Right-click the Local Area Connection that corresponds to the AML dongle. 5. 6. Click Properties. Click Internet Protocol Version 4 (TCP/IPv4). 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 31 of 34 7. 8. Click Properties. Click Use the following IP address. In IP address, type 192.168.100.1. In Subnet mask, type 255.255.255.0. In Default gateway, type 192.168.100.200. 9. 10. 11. 12. Click OK. 13. Close the Control Panel. 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 32 of 34 Reset the AML 1. Place the AML on a flat surface. 2. Using the point of a pen or similar implement, press the Reset button on the AML. 9. Additional Information 9.1. Glossary 9.1.1. Glossary: AML User Guide Leveling Wafer (leveling tool) Front End Controller The computer that controls the system. Front Opening Unified Pod AML FEC FOUP IPA SSID UI Isopropyl Alcohol Substrate ID User Interface 9.2. Revision History: AML User Guide This is the revision history of this document. Major changes such as task or spec changes will be documented. Minor changes like spelling and formatting issues will not be documented. 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 33 of 34 Rev Date Changes Author Reviewer Approver AA 11/2019 Initial Release Caroline Ben-
Eran Bachinski Avi Zaban Ari 9.3. Copyright Copyright 2019 by KLA Corporation. All rights reserved worldwide. No part of this publication may be reproduced, modified, transmitted, transcribed, stored in retrieval systems, or translated into any human or computer language, in any form or by any means, electronic, mechanical, magnetic, chemical, manual, or otherwise, without the express written permission of KLA Corporation, One Technology Drive, Milpitas, California 95035. KLA Corporation may revise this document at any time without notice. 9.4. Trademarks KLA and the KLA logo are trademarks of KLA Corporation. All other brand and product names may be trademarks of their respective companies. 9.5. Reprint Acknowledgments This document contains excerpts from the following SEMI Standards and/or Safety Guidelines:
SEMI S1 Safety Guideline for Equipment Safety Labels and SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment." Copyright Semiconductor Equipment and Materials International 2018. All Rights Reserved. Used by Permission. SEMI is a registered trademark of Semiconductor Equipment and Materials International. www.semi.org This document contains the original instructions prepared in standard English by KLA Corporation or a translation of the original instructions. 9.6. Branding Changes KLA Corporation was formerly known as KLA-Tencor Corporation. The following document may contain content created before the name change and may use KLA-Tencor to refer to KLA. 9026908-000, Rev. AA AML User Guide KLA Secret Externally Restricted Page 34 of 34