FCC ID: QTA482-22-0800 Bluetooth Test and Calibration Device

AccuraC User Manual SensArray 47451 Fremont Blvd. Fremont, CA 94538 510-360-5600 Fax 510-360-5601 info@sensarray.com www .sensarray.com Copyright 2003 by SensArray Corporation. All rights reserved. UM-ACC-A 2003.02 This manual applies to the 3.0.6 version of Thermal MAP software. SensArray reserves the right to modify, change, or improve any or all specifications published in this document without notice. Important Notices Warranty Thermal MAP Software SensArray Corporation warrants that (a) Thermal MAP software (Software) will perform substantially in accordance with the accompanying written materials for a period of 12 months after shipment, and (b) the medium on which the Software is recorded will be free from defects in materials and workmanship under normal use and service for a period of 12 months after shipment. Faults caused by unauthorized modification, misuse or abuse of products, or problems due to software not supplied by SensArray, are not covered by this Warranty. During the Warranty Period, the purchaser may return failed Software to SensArray for repair or replacement, at SensArrays option. SensArray does not warrant that the operation of the Software shall be uninterrupted or error free. The purchaser will first notify SensArray of the nature of the problem and obtain a Returned Materials Authorization [RMA] number. The purchaser will pay the costs of shipping returned Software to SensArray; SensArray will pay the cost of shipping repaired/replaced Software to the purchaser. No other warranty is expressed or implied. SensArray specifically disclaims the implied warranty of merchantability and fitness for a specific application. The Thermal MAP Software Documentation Materials (Documentation) are subject to revision and change without notice. SensArray agrees to make a best effort attempt to keep the purchaser advised of changes to the Documentation. AccuraC System Hardware SensArray Corporation warrants that the AccuraC Systems (Products) sold will be free from defects in material and workmanship, and perform to SensArrays applicable published specifications for a period of 12 months after shipment. The liability of SensArray hereunder shall be limited to replacing or repairing, at its option, any defective Products that are returned F.O.B. to SensArrays plant in Fremont, CA. In no case are Products to be returned without the purchaser first obtaining SensArrays permission and Returned Materials Authorization [RMA] number. In no event shall SensArray be liable for any consequential or incidental damages. Products that have been subject to abuse, misuse, accident, alteration, neglect, or unauthorized repair or installation are not covered by this warranty. SensArray will make the final determination as to the existence and cause of any alleged defect. SensArray is not responsible for maintaining or supplying any consumable materials used in conjunction with this hardware and SensArray is not liable for expendable items such as fuses, lamps, paper, ink, etc. No warranty is made with respect to any customized equipment or Products supplied with AccuraC systems where produced to Purchasers specifications except as specifically stated in writing by SensArray in the contract for such Products. The purchaser will pay the shipping costs of returned materials to SensArray; SensArray will pay the cost of shipping repaired/replaced material to Purchaser. This Warranty is the only warranty made by SensArray with respect to the Product delivered hereunder and may be modified only by a written instrument that is signed by a duly authorized officer of SensArray and accepted by Purchaser. Except as provided above, SensArray makes no warrantees, expressed or implied, including any warranty of merchantability for a particular purpose. Software License Agreement The Software is owned by SensArray Corporation and is protected by United States copyright laws and international treaty provisions. Therefore, you must treat the Software like any other copyrighted material. Under the Copyright Laws, the Thermal MAP Software, or accompanying written materials, may not be copied, photo-copied, reproduced, translated, in whole or in part, without the prior written permission of SensArray. You may make one copy of the Software solely for backup or archival purposes. You may make 10 copies of the written materials accompanying the SensArray Corporation-

produced Software provided that such copies are solely for use by personnel using Thermal MAP. All rights not expressly granted to you in this Agreement are reserved to SensArray Corporation. Third-Party Software Licenses for any software which was provided but not produced by SensArray Corporation are granted solely and only by the original supplier or manufacturer and solely and only with the suppliers limitations and rights. Copying restrictions for such software are governed solely and only by the original supplier or manufacturers license or any other supplier-approved agreements, as applicable. Trademarks SensArray, Thermal MAP, and AccuraC are trademarks of SensArray Corporation. Windows and Excel are trademarks or trade names of Microsoft Corporation. Any other terms mentioned in this document that are known to be trademarks or service marks have been appropriately capitalized. Use of a term in this document should not be regarded as affecting the validity of any trademark or service mark. FCC Compliance Statement:

This device complies with part 15 of the FCC Rules. Operation is subject to the following two conditions: (1) This device may not cause harmful interference, and (2) this device must accept any interference received, including interference that may cause undesired operation. CAUTION: Changes or modifications not expressly approved by the manufacturer responsible for compliance could void the users authority to operate the equipment. Important Note: To comply with FCC RF exposure compliance requirements, the antenna used for this transmitter must be installed to provide a separation distance of at least 20cm from al persons and must not be co-located or operating in conjunction with any other antenna or transmitter. European Union Notice This system has been tested for conformance with CE radio spectral, EMC and safety requirements. Chapter 1 Overview The AccuraC system is a unique robot loadable temperature measurement system designed for advanced track systems with two or more robot arms. The AccuraC system consists of a Process Probe 1880 thin film RTD hybrid wafer in combination with an advanced battery powered, disk-shaped, intelligent sensor interface system (DISIS), which is the same diameter and weight of a process wafer. The data collected by the system is sent to a laptop computer running Thermal MAP software via a Bluetooth wireless connection for later analysis. The AccuraC User Manual is designed as a quick reference document to setup and use the AccuraC system in conjunction with the Thermal MAP software. For more detailed information on using the Thermal MAP software, please refer to the Thermal MAP 3 User Manual or the help file. A PDF version of the manual may be found in the C:\Sensarray\Documents folder on the laptop hard drive. This chapter discusses the features of the AccuraC system. The AccuraC System The wafer and the DISIS are connected using two specially developed polyimide flat cables and placed on the lower and upper robot arms respectively. The robot arm holding the Process Probe 1880 wafer extends at half the normal speed to place the instrumented wafer on the hotplate. The system is now ready to make measurements. The AccuraC system can be setup to follow the exact movement of a product wafer to measure the transient temperature conditions on the wafer during both transportation and thermal heat up and cool down. Figure 1. AccuraC System on Retracted Robot Pincers Measurements taken by the sensors are converted from analog to digital signals within the DISIS module, which are then exported via Bluetooth RF link and received by the Bluetooth antenna at the laptop computer. The Thermal MAP software on the computer is triggered to collect data from the antenna, which is then processed, analyzed and displayed. SensArray 1-1 AccuraC User Manual Chapter 1 Overview Acquiring Data The Thermal MAP software acquires and logs the data collected by the AccuraC system. With the Thermal MAP data acquisition features, you can simultaneously view and log wafer temperature sensor data. The data is observed on the strip charts and digital readouts during the acquisition. The software allows the user to determine how often and for how long the data points will be collected. The user may chose which temperature scale the data will be calculated in, or display the direct resistance output of each sensor on the wafer. Thermal MAP measures the uncorrected sensor signals, applies corrections for sensor and data acquisition system calibration offsets, then converts the readings to temperature. The data is saved to the laptop hard disk for later analysis. Analyzing Data Previously logged data files may be analyzed using a powerful graphic interface to view XY graphs, contour maps, surface maps, animations, and data tables. The logged data is stored in a data table. Thermal MAP Analysis graphics can be viewed directly without opening the data table. Or the data can be viewed and evaluated in table form, if desired. A row in the table is called a sample or a single-timed sampling of all of the sensors on the wafer and system inputs. You use the sample number to identify the table row of measurements collected at the sample time. The first column in the table is the sample number. The second column is the elapsed time at which the sample was acquired. For example, as shown in Figure 2, Sample# 0 has a time of zero. The remaining columns in the table are the temperatures of the individual RTD sensors within the wafer. Additional columns of data can be present if system sensors, digital, and/or calculated values have been logged. In addition to the data within the table, the data file stores other pertinent information including run date and time, operators name, and a description of the testwhich you enter before acquisition. AccuraC User Manual 1-2 SensArray Chapter 1 Overview Figure 2. Sample Data Table During acquisition, Thermal MAP performs computations on acquired data, such as determining the minimum, maximum, mean, range (max-min), and standard deviation of all wafer sensor values for the sample, and logs the results in columns. These computed values are referred to as calculated values. After acquiring, linearizing, and storing the sensor data, you can display or print the data as a line plot graph, as shown in Figure 3. In addition, you can display data in a table or as a wafer map. Figure 3. Displaying Data on a Line Plot Graph SensArray 1-3 AccuraC User Manual Chapter 1 Overview You can also display a 2-dimensional color contour map as shown in Figure 4 or a 3-

dimensional surface map as shown in Figure 5. Figure 4. Two-Dimensional Color Contour Map Figure 5. Three-Dimensional Surface Map With the Animation feature, an animation of the acquired data can be created. The animation can be set for a particular range of the acquired data, saved to a standard AVI file, and replayed at any time. The AVI file can be sent to other computers not running the Thermal MAP software and played using the Windows Media Player With the Derived Files Feature, statistical data can be generated for selected periods of an acquisition run. In addition, the differences in selected sensor readings between two different acquisition runs may be compared. Data may also be exported to a spreadsheet program, edited in the spreadsheet, and loaded back to Thermal MAP for further analysis. AccuraC User Manual 1-4 SensArray Chapter 2 System Setup and Operation Before you can begin working with the AccuraC system, you need to unpack the system components, prepare the equipment for transfer to the cleanroom, and connect the system cables. Connecting the System Before shipping, SensArray assembles and tests the AccuraC system. The Thermal MAP software is preinstalled and configured. To setup the system, you only need to connect the cable from the wafer to the DISIS unit and install the Bluetooth module to the laptop. Do not load any additional software on the system hard drive. All required software is loaded and tested prior to shipping. Connecting the Wafer to the DISIS To connect wafer and DISIS unit, complete the following instructions. 1. Slide the locking tab on the wafer connector forward to unlock the connector. Figure 1. Connector Board Components 2. Place the DISIS unit and the wafer so that the twin cable and connector face each other as shown in Figure 2. SensArray 2-1 AccuraC User Manual Chapter 2 System Setup and Operation Figure 2. Wafer DISIS Connection 3. Place the wafer connector over the guide pins of the DISIS connector and press down to firmly seat the connector. Slide the locking tab back to lock the connection. Turning the System On After all the component connections are completed, the system is turned on to verify proper operation. 1. Locate the power switch on the laptop and turn the power ON. If the system turns on successfully, Windows 2000 logon screen will appear. 2. Logon to Windows 2000. The system is shipped with the password field blank (no password) and you only have to hit <Enter> to log on to the system. 3. Plug the Bluetooth adapter into a USB port. 4. Verify that the DISIS unit is turned on. The green LED next to the connector should be flashing. If not, press and hold the Power button on the DISIS for at least one second. (To turn the power off, just press the power button a second time.) Figure 3. DISIS Component Locations 5. Open My Bluetooth Places from the desktop. SensArray 2-2 AccuraC User Manual Chapter 2 System Setup and Operation 6. Open Entire Bluetooth Neighborhood and read the list of Bluetooth items available. If there is more than one DISIS unit assigned to the system, locate the DISIS with the same serial number as the DISIS unit you are using for the test. Double-click on the ISIS unit icon. 7. Check that the serial port shows Connected. If not, right-click on the icon and select Connect Serial Port. Note the number of the COM port displayed in the right-hand column. 8. Launch the Thermal MAP Software by clicking on the Thermal MAP icon on the desktop. 9. Click on Acquisition. If the DISIS is not found, click on Select Serial Port and set the serial port to the number noted above. Then click Retry. 10. Once the DISIS unit is recognized, acquire data normally. Loading the System on the Robot Arms To place the system on the robot arms, complete the following instructions. 1. Have the operator extend the bottom robot arm. The robot should be moving at no more than 50% speed. 2. Carefully remove the wafer from the wafer carrier with one hand. With the other hand, pick up the DISIS unit. Keep the DISIS unit above the wafer. 3. Carefully place the wafer on the lower robot arm. 4. Keep the DISIS unit clear of the robot extension area and have the operator extend the upper robot arm. Place the DISIS unit on the upper arm. 5. Align the wafer and DISIS unit so that the two cables are parallel with the robot extension. 6. Have the operator retract both robot arms. SensArray 2-3 AccuraC User Manual Chapter 2 System Setup and Operation Charging the DISIS Unit The DISIS unit is charged by placing the entire unit on a charging station. To charge the DISIS, perform the following steps:

1. If the wafer is still connected to the DISIS, place the wafer in the wafer carrier. Slide the locking tab forward and disconnect the cables from the DISIS unit. 2. Plug the power supply into the charging station. Plug the other end of the power supply into an AC outlet. Verify that the red Power LED on the charging station is lit. 3. Place the DISIS unit face up on the charging station so that the power connector posts on the charging station go through the matching holes in the DISIS. Press down to seat the DISIS unit. 4. When the DISIS unit is fully charged, the green Charge LED on the charging station will light. You can now remove the DISIS from the charging station. The charging process should take less than 2.5 hours. (Note: leaving the DISIS in place will not harm anything, the charging current drops to a trickle to maintain the charge.)

* The DISIS unit will run for at least 10 hours without recharging. SensArray 2-4 AccuraC User Manual Chapter 3 Acquiring Data This chapter discusses Thermal MAP 3 Acquisition, including a thorough explanation of the following areas. Acquisition SetupSetting acquisition options Additional Acquisition FeaturesConfiguring hardware and calculated channels, and setting triggers Acquisition DisplaySetting channel attributes and viewing wafer configurations Acquisition Setup Before acquiring data, you need to set options for the data acquisition run. After starting a run, you can use a graphical stripchart display to view data as it is acquired. This section discusses operating the configuration editors and setting up the system input and calculated channel configuration files. These files store information on how to acquire and log data for a particular hardware configuration. In addition, this chapter discusses the following topics. Using Acquisition Setup window options Configuring system input and calculated channels for specific process systems, chamber modules and test parameters Starting data acquisition Using the Acquisition Setup Window You can begin acquisition by choosing Acquisition when you log onto Thermal MAP 3. If you are analyzing a previously recorded file, you can begin acquisition by choosing AcquisitionAcquire from the menu bar. If the system is unable to initialize the serial port, please refer to the Thermal MAP 3 User Manual or the help file for troubleshooting information. A PDF version of the manual may be found in the C:\Sensarray\Documents folder on the laptop hard drive. If all the connections are correct, a message briefly appears identifying the DISIS unit and then the Acquisition window shown in Figure 3-1 opens. SensArray 3-1 AccuraC User Manual Chapter 3 Acquiring Data Figure 3-1. Basic Acquisition Setup Window The following table describes fields on the Acquisition Setup window. Field Description or Result Operators or equipment logon name. The name of the user or equipment from the logon is the default name in the box. The name can be changed by highlighting the current operator name and typing a new name in the box. This field allows you to enter information regarding the test. You can use the scroll bar to access any information that overflows the window. Update automatically from the system calendar and clock. When the Setup ISIS Wait For Trigger button is pressed, the date and time displays freeze and become the start of acquisition date and time recorded with the data. Name of the file that logs data. The field defaults to the filename for the previous acquisition. The default data directory is C:\Sensarray\Data. The default file type is .MAP. To change the name of a new file, highlight the current file name and enter a new name. You can leave the Data File field blank and acquire data without writing the data to a file. When you start the acquisition, a prompt confirms that you do not wish to log data. To clear the Data File field, highlight the text and use the <Delete>

key to remove the name. To change location of the data file, click on the Browse button to open the Save As dialog box. If you do not want to overwrite an existing file, assign a unique name to the file in the File name field on the Save As dialog box. SensArray 3-2 AccuraC User Manual Chapter 3 Acquiring Data Field Description or Result This specifies the time interval between samples. To set the units, click on the units field and use the popup menu. To change the resolution for sec (seconds) or min (minutes), you must type in a value. The equivalent rate in Hertz is shown on the right. Alternatively, you can specify a rate in Hertz and the closest sample interval is selected automatically. Specifies the time period to acquire samples. Dividing the period by the scan interval gives the total number of sets of samples. This number is only an upper limityou can stop the acquisition manually at any time before the limit is reached. Note: After you trigger the acquisition, you cannot modify the Acquire For field. Figure 3-2. Sample Rate Controls The controls shown in Figure 3-2, perform the following functions:

Use the left control to specify the length of time for acquisitions. This value must be higher than Scan Every period. If you put in a value that is lower, the software will automatically adjust the Acquire For period to equal one sample. Use the center control to specify the unit. Select seconds, minutes or hours from the popup menu. The indicator on the right of the = (equal sign) shows the total number of samples of the acquisition unless stopped prematurely. The indicator updates automatically if you change the Acquire For or Scan Every period. Alternatively, you can enter the number of samples into this field and the time values in the Acquire For period update accordingly. Specifies the unit of measure for the logged data. When you click on Scale, a popup menu appears. From this menu, select the temperature scale you wish to use:

For RTD-instrumented wafers, you can also select resistance. By selecting resistance, Thermal MAP logs sensor resistance without converting the readings to temperature. SensArray 3-3 AccuraC User Manual Field Description or Result Chapter 3 Acquiring Data Displays the type and serial number of the wafer that will be used. If the system detects the correct wafer, it displays the wafer number in the window. If the correct wafer is not displayed, ensure the calibration file included with your wafer was installed. Select Auto from the popup menu to detect automatically the installed wafer (default). Or you can select other installed wafer configurations from the popup menu. For the Auto command to function properly, a wafer with an ID chip in its connector must be connected to the ISIS unit. From the popup menu, you can access all valid wafer configurations that are currently stored in the Configs folder. However, selecting an incorrect wafer yields invalid readings, graphs and maps. A message that displays the current status of acquisition, such as Acquisition Setup, Waiting For Trigger, or Acquiring Data. Once acquisition has begun, this indicator displays the total number of samples that are currently acquired, as well as the total number that the acquisition run will acquire before completion. Once acquisition has begun, these indicators show the time remaining and the time elapsed. Using Acquisition Setup Buttons Button You can use the following buttons on the bottom of the Acquisition Setup window. Description Expands the window to include options for hardware and calculated channel configuration. In addition, you can setup triggering. See the Additional Acquisition Features section of this chapter for more information. Multi-purpose button used to start or trigger an acquisition, depending on current state. When you complete the acquisition setup, you must press this button to configure the ISIS. Acquisition does not start until the trigger condition is met. If set for manual trigger, this button must be pressed again. Multi-purpose button used to stop an acquisition, or exit the acquisition module, depending on current state. SensArray 3-4 AccuraC User Manual Chapter 3 Acquiring Data Additional Acquisition Features With the additional acquisition features, you can define hardware, calculated channel configurations, and set triggering. Press the More Options button to expand the Acquisition Setup window and open the right-hand pane, as shown in Figure 3-3. Figure 3-3. Expanded Acquisition Setup Window For detailed information on using the additional acquisition features, such as hardware configurations or setting system and module information, please refer to the Thermal MAP 3 User Manual located in the C:\SensArray\Documentation folder on your hard disk or use the help file. Setting Calculated Channel Configurations With Thermal MAP, you can perform computations on the wafer or substrate sensor data and log the results as separate data columns. The Calculated Configuration field on the expanded portion of the Acquisition Setup window displays the configuration selected for the next acquisition. You can select a different configuration from the pull-down menu, as shown below. If you select New Configuration from the menu, the Calculated Configuration Editor opens. See the next section, Creating and Modifying Calculated Configurations, for more information. To edit the selected configuration, press the Edit button to open Calculated Configuration Editor. See the next section, Creating and Modifying Calculated Configurations, for more information. SensArray 3-5 AccuraC User Manual Chapter 3 Acquiring Data Creating and Modifying Calculated Configurations By selecting the New Configuration option or pressing the Edit button under the Calculated Configuration field, you open the Calculated Configuration Editor, as shown in Figure 3-4. With the editor, you have the option of logging specific calculations. The calculations are performed on a sample-by-sample basis. The calculated data is logged for each set of readings at a given time. Figure 3-4. Calculated Configuration Editor The following table describes fields, checkboxes, and buttons on the Calculated Configuration Editor window. Fields/Buttons/ Checkboxes Definition or Result Includes the minimum sensor reading in the list of calculated channels. Includes the maximum sensor reading in the list of calculated channels. Includes the range (maximumminimum) of the sensor readings in the list of calculated channels. Includes the arithmetic mean (or average) of the sensor readings in the list of calculated channels. Includes the standard deviation of the sensor readings in the list of calculated channels. Includes the wafer rotation position displayed on the Acquisition Display window in the list of calculated channels. Name you assign to the configuration that you are creating or editing. A new name may be entered or the existing name changed by clicking in the text box and editing or entering the desired name. Description of the hardware configuration. For example, Standard Wafer Calculated Configuration. Saves modifications to the configuration. SensArray 3-6 AccuraC User Manual Fields/Buttons/ Checkboxes Chapter 3 Acquiring Data Definition or Result You use this option to save a new configuration for the first time. If the configuration name exists, press this button to create a duplicate configuration of the same name. If you save a duplicate copy, the original version remains displayed. You can view duplicate configurations from the pop-up menu of the Hardware Configuration field on the expanded Acquisition Setup window. The configurations appear in the order of creation. Opens the help file for this window. Deletes the currently displayed configuration. The default configuration loads after a deletion. Cancels any changes you made to a configuration and ends the editing session. Acquisition Display From strip charts and diagrams on the Acquisition Display window, you can observe data as it is acquired. This section discusses using the Acquisition Display window, setting channel attributes, and viewing wafer or substrate configurations. If a filename was specified in the Acquisition Setup, the Line Plot Display window from the Analysis program will automatically display after acquisition is complete and you exit Acquisition Setup. To display a strip chart as the acquisition is occurring, select DisplaysStripchart Display (or press <Ctrl>+<F5>) from the Acquisition Setup window to open the Acquisition Display window as shown Figure 3-5. Figure 3-5. Acquisition Display Window The following table describes the features of the window that you can manipulate to control the display of data. SensArray 3-7 AccuraC User Manual Item Chapter 3 Acquiring Data Strip Chart Displays Description On the left portion of the window are two strip-charts that display readings and calculated data during acquisition. The upper chart displays readings in units of temperature. The lower chart displays values in units other than temperature. If the display range obscures the plots, you can change the range of the temperature scales to the right by editing the text in the top or bottom label of each scale. From the popup menu, you can set the number of samples (from 10 to 2000) displayed at one time in the chart. Changes the background color of the strip chart and map display. The button toggles between a white and black background. Press the Setup ISIS Wait For Trigger button to command the ISIS to perform a self-calibration and wait for the trigger to start the acquisition. After setup, the text in this button changes to Trigger. You can start data acquisition by pressing the Trigger button. The functionality of this button is identical to the Setup ISIS Wait For Trigger button on the Acquisition window. Exits the Acquisition windows, unless an acquisition is running. If an acquisition is running, this button is used to Stop Acquisition. Pressing the Stop Acquisition button stops the acquisition manually. The functionality of this button is identical to the Exit Acquisition button on the Acquisition window. Numeric Display The Numeric Display shows the name or the temperature of each sensor on the Popup Settings substrate or wafer map. In addition, the calculated data displays in separate numeric readout on the bottom of the map. If you click anywhere on the right-hand side of the Strip Chart Display, except on a sensor position, a popup menu appears. This allows you to set the view of the data in the strip chart display for temperature and system inputs. Press the binocular icon to autorange the charts to show the minimum and maximum readings that correspond to the time or sample range specified at the bottom of the graph. This is the default condition. To turn the autorange option off, click the binocular icon again. A manual control to note the wafer position in the chamber. This is not used with the AccuraC since the wafer cannot be rotated. Click to produce a black and white display. SensArray 3-8 AccuraC User Manual Item Description Sets the number of decimal places to represent data. You can select from the following formats in the Display Format pull-down menu. Chapter 3 Acquiring Data The decimal formats apply to the map displays, strip charts, and the calculated data readings. If you select a decimal format and then select Name from the pull-down menu, the strip chart and calculated data readings remain at the last selected decimal format. Setting Channel Attributes This section describes options on the Numeric Display pop-up menu. By clicking directly on a value or label in the Numeric Display, the sensor channel pop-up menu appears, as shown in Figure 3-6. In the menu, you can set attributes for a specific sensor or system input channel. If you click in an area between sensor indicators, you can set attributes for all sensor channels. See the Setting Attributes for All Channels section of this chapter for more information. Figure 3-6. Channel Pop-up Menu on the Numeric Display As shown in Figure 3-6, if you click on a particular sensor, you access the pop-up menu for that sensor. SensArray 3-9 AccuraC User Manual Chapter 3 Acquiring Data Hiding a Channel To hide the line plot of a channel from the strip chart display, select Hide. When a channel is hidden, it is not disabled but its values are acquired and logged. Hidden channels have a value or label that is dimmed (gray). To display the channel, select Show. You can also toggle the display state of the sensor by clicking quickly on the sensor value or label. Holding the mouse button down will cause the menu to appear. Scaling to a Particular Channel Select the Scale To option to scale the strip chart that the channel is displayed to the minimum and maximum values for the channel. Highlighting a Channel To add markers to a strip chart plot for easier identification of a channel, select Highlight, choosing either dots or a thick line. To restore the channel to the normal line appearance, select Highlight again to un-check it. Disabling a Channel Select Disable to disable a sensor channel. If a sensor is not reading correctly, you can disable the channel so it does not affect statistical channels such as max or mean. Disabling removes the channel from the strip chart display and logs the values as NaN

(not-a-number). This value distinguishes the disabled channel data from accurate data and is not included in the calculated channel values. NOTE: Disable channels with care. Disabling a sensor during acquisition is not the same as hiding it. Disabling a sensor means that Thermal MAP will NOT acquire data for the sensor. Information about which channels are disabled is stored with the wafer configuration file for the wafer. A disabled channel remains disabled until you re-enable the channel. To enable a disabled channel, select Enable. Setting Attributes for All Channels If you click on an area of the Numeric Display that is not associated with a specific sensor channel label, a pop-up menu appears in which you can hide, show, highlight, or unhighlight all wafer or system channels simultaneously. For example, if you want to show only one sensor channel, select Hide for all channels and select Show for the specific channel. Returning to the Acquisition Setup Window To return to the Acquisition Setup window, select DisplaysAcquisition Setup on the Acquisition Display window. SensArray 3-10 AccuraC User Manual Chapter 3 Acquiring Data Viewing Wafer Configurations To view the wafer configuration that you are using for acquisitionor any other one in your Configs directoryselect Displays View Wafer Config on the Acquisition Setup window. This action opens the Wafer Configuration Viewer, as shown in Figure 3-7. Figure 3-7. Wafer Configuration Viewer The Wafer field is the only field you can change to view a configuration. The Wafer field defaults to the configuration selected in the Acquisition Setup window. By clicking on the up/down arrows, you can move through a list of wafer configurations files in the Sensarray\Configs directory on your hard drive. By clicking in the Wafer display box, the entire list of wafer configurations available pops up and you can select a file from the list. If the Acquisition Setup window is open and you change the selected wafer configuration in the Wafer Config Viewer to a type of configuration compatible with connected ISIS unit, the wafer that is currently selected in the Setup window changes as well. By placing the mouse cursor over a sensor on the sensor map in the upper right-hand corner of the viewer, the line for that sensor is highlighted in the table. In addition, you can display the Wafer Configuration Viewer from the Analysis Window or the Data File Info window. You access the Date File Info window by selecting DisplaysInfo. SensArray 3-11 AccuraC User Manual Chapter 4 Analyzing Data After acquiring and storing the sensor data to a file, you can use Thermal MAP Analysis to interpret the thermal characteristics of the wafer parameters. You can use the analysis display to zoom in on segments of the data for closer examination, highlight individual sensor readings, view a diagram of the wafer that demonstrates spatial relationships of temperature data, or view data in a spreadsheet form. Opening Data Files To use Thermal MAP Analysis, at least one data file must be open. To view a saved file, press the Open File button, or if another window is already open, select Open from the File menu. The file dialog box appears with the list of available file names. In Thermal MAP 3, all data files by default are created with a .map extension. Double-click on the file to analyze, or highlight it and press Open. The Thermal MAP analysis window appears, as shown in Figure 4-1. In the Analysis window, you can open additional data files at any time by selecting FileOpen or pressing <Ctrl> + O. You can open and view up to six data files at one time. Using the Analysis Window The Analysis window opens and the graph displays data from the file you selected. Note that large data sets take longer to load. The following sections explain the display options of the resizable Analysis window. Figure 4-1. Analysis Window SensArray 4-1 AccuraC User Manual Chapter 4 Analyzing Data When selecting a data file to view, a time vs. temperature graph of the saved data appears when the file is opened. Using Analysis Menus The analysis window has the following menus: File, Edit, Displays, Animation, Acquisition, Windows, and Help. This section contains brief descriptions of using menu items on the Analysis window. File Item Open Close Save Save As Result Opens a data set in a new analysis window. You can open a file in either Thermal MAP format or spreadsheet format. The menu item is grayed-out if you have the maximum number of data sets open. Closes the analysis window. Saves the data file under the same name in the same format and location as previously saved. Enabled only if the data file has been changed, such as if comments were added or changed on the Info window. Saves a copy of the data file. Either Thermal MAP or spreadsheet-

compatible text format may be saved. The name and/or location of the file may also be changed. Print Window Prints a hard copy of the window. Print Report Prints a hard copy of the line plot graph, legends, and file information for the current data file. Saves the current window to a graphic file. The files may be viewed at a later time and pasted into other documents. Opens the batch converter that enables conversion of older file types to Thermal MAP 3 files. Also converts Thermal MAP files to and from spreadsheet files. Opens a dialog box to change the user name currently using the program, and thereby change the preferences settings to those of that user. Closes all files and exits Thermal MAP. Print to File Convert Data Files Change Current User Exit Thermal MAP Edit Item Cut Copy Paste Preferences Allows user to define preferred program settings. Preferences are saved for Result Cuts selected text to the clipboard Copies selected text to the clipboard Pastes cut or copied text from the clipboard each user. AccuraC User Manual 4-2 SensArray Displays Chapter 4 Analyzing Data Item Contour Surface Numeric Table Info Result Opens a Contour display window for the data file and maps the sample at the left-hand selection bars position on the graph. Opens the Surface display window for the data file and maps the sample at the left-hand selection bars position on the graph. Opens the Numeric display window for the data file and shows the data for the sample at the left-hand selection bars position. Data updates when the selection bar is moved. Opens the Data Table window for the data file. Opens the File Info window for the data file. This window displays information about the data file and allows entry of comments. Displays a table showing the configuration of the wafer used to acquire data, including sensor locations and status. Accesses the Derived File Wizard. View Wafer Config Derived File Wizard Animation The Animation function creates a movie of the data between two time points of your data set. The data can be displayed in contour maps, surface maps, or both. Item Create Play Result Opens dialog box to create an animated sequence of the data between the selection bars on the graph. Open created animation file for playback. Acquisition Result Starts the Thermal MAP Acquisition module and opens the Thermal MAP Acquisition window. Item Acquire Windows The Windows menu includes a list of all Thermal MAP windows that are open. Selecting an item on the list brings that window to the front. Help Item Line Plot Display Result Opens the online help to information about the XY graph. SensArray 4-3 AccuraC User Manual Chapter 4 Analyzing Data Item Contents About Thermal MAP Result Opens the table of contents for the online help. Opens the Thermal MAP logo screen. This screen contains information about the Thermal MAP version and how to contact SensArray Corporation. Displaying Data on Line Plots The line plot graph displays colored line plots of wafer temperature data, calculated data, and system input data. The line plot graph includes the following features. You can view sample time that corresponds to the beginning and end of the selected sample range in the selection bar controls below the graph. The graph axes automatically scale to fit the data being plotted, or you can set the axes manually. For system and calculated channels measured in units of temperature, the data is plotted relative to the left-hand scale. For system and calculated data channels with units other than temperature, the data is plotted relative to a separate scale that is drawn along the right-hand side of the line plot graph. The Hardware Configuration and Calculated Configuration files define the default range of these scales. You can identify corresponding wafer sensors for system and calculated channels using the line plot legends on the left of the graph. Each colored line on the graph corresponds to a wafer sensor or calculated data. Readings and calculations (y-axis) display against the sample number or elapsed time (x-axis). You can use the line plot graph to visualize the temperature for one or more areas on the wafer over a period of time. You can display any combination of wafer sensors and calculated values. The line plot legends, located on the left portion of the graph, have the following features. The Sensor Map contains dots that represent the position of each sensor on the wafer. The color of the sensor dot corresponds to the color of the line on the line plot graph. The System Inputs and Calculated Channel legend associates calculated values by name. For example, the color of the MEAN legend corresponds to the color of the mean temperature plot. Sensor Map System Input and Calculated Channel Legend Controlling the Line Plot Display This section describes features on the line plot graph, including changing the line plot mode and manipulating the scale, shown in Figure 4-2. AccuraC User Manual 4-4 SensArray Chapter 4 Analyzing Data Figure 4-2. Line Plot Graph Scale Changing the Line Plot X-Axis Units You have the option of setting units for the x-axis as time (minutes or seconds) or sample number. By clicking on the x-axis legend, you can select the option from a pop-up menu, as shown below. You can change the x-axis to represent sample numbers or time. Changing Line Plot Graph Scales You can change the scale of the line plot data for easier viewing. For example, you can change the scales to view a subset of the data at a higher resolution. To change the scale at which the data is viewed, perform the following steps. Select the x- or y-axis values by double clicking on the value. Enter a new value into the scale label and press the <Enter> key. Using Legends and Controls This section discusses using legends and controls on the Analysis window. SensArray 4-5 AccuraC User Manual Chapter 4 Analyzing Data Figure 4-3. Elements of the Analysis Window Using Legends The Analysis window contains the following legends: Sensor Map, and System and Calculated Channels. Sensor Map The Sensor Map, located on the top left of the Analysis window, shows where sensors are positioned on the wafer. Each sensor, representing an individual line plot, displays as a large, colored dot. Sensors not selected for plotting appear as small gray dots. You can display the sensor identification, by passing the cursor over the specific sensor. On the Sensor Map, you can click on a sensor dot to access a pop-up menu. From the menu, you can select the following. AccuraC User Manual 4-6 SensArray Chapter 4 Analyzing Data Disable SensorExcludes the data of a sensor from the line plot display and from computation in surface fits. The disabled sensors are indicated with a small gray dot. You can also toggle this state of the sensor by clicking quickly on the sensor value or label. Holding the mouse button down will cause the menu to appear. Highlight Sensor dots Highlights the trace in the graph by plotting a filled circle at each sample interval. Highlight Sensor thick Enlarges the trace in the graph for easier location on the line plot. If you click on an area of the Sensor Map that is not associated with a specific sensor, a pop-up menu appears in which you can enable, disable, highlight, or unhighlight all wafer sensors simultaneously. Using the Graph Display Controls Graph display controls consist of menus and tools for manipulating the display of data. The following table describes the Graph Display controls. Control Description With the Crosshair icon, you can manually move any selection bar or crosshair to the nearest sample interval. To use the tool, first click on the icon, then click on a selection bar or crosshair and drag to move it. For finer motion control, see the Using Crosshairs section of this chapter. The Hand Tool allows you to pan the XY graph within the window. You use the magnifying glass menu to adjust the view of the data (zoom) in the graphic display. Click on this icon to display the zoom options pop-up, as shown below. For in-depth descriptions of the zoom modes, see the Using the Zoom Mode section on the next page. The Binocular icon zooms out the display to the full data set. SensArray 4-7 AccuraC User Manual

Chapter 4 Analyzing Data Using the Zoom Mode To enter zoom mode, click on the Zoom icon and choose a zoom mode from the pop-up menu. In zoom mode, the cursor becomes a magnifying glass as you move it over the line plot graph. The following table describes zoom mode options you can select from the pop-up menu. Icon Name Function How to Use Zoom on Area Magnifies a selected rectangle of the graph Zoom on x-axis Magnifies a portion of the x axis Zoom on y-axis Magnifies a portion of the y-axis Undo Zoom Reverses the last zoom action Zoom In Repeatedly zooms in towards the cursor Zoom Out Repeatedly zooms out away from the cursor Click near an area of interest and drag the mouse to select a rectangular region Click to one side of the area of interest and drag the mouse horizontally Click above or below the area of interest and drag the mouse vertically Click on this icon to undo the last zoom actionthis is a single level undo Click on the point on the graph from which to zoom in. Pressing and holding the mouse button causes repeated zooming. Click on the point on the graph from which zoom out. Pressing and holding the mouse button causes repeated zooming. Returning to the Default View After using the Zoom mode, you can return to the original displaywhere all data displays in the windowby clicking on Binocular icon. AccuraC User Manual 4-8 SensArray Chapter 4 Analyzing Data Selecting Data with Graphical Cursors With cursors, you can view specific data or a range of data on the line plot graph. Thermal MAP has two types of cursors: crosshairs and selection bars. This section discusses using and positioning both types. Time/Sample Controls Green Crosshair Selection Bars Arrow Controls Red Crosshair Figure 4-4. Crosshair and Selection Bar Controls When generating numeric, surface, and contour maps, the displays are generated for the leftmost, or Start selection bar. When generating an Animation or Derived file, you select a range of samples or time using both selection bars. Precision This section describes how to change the precision of the displays. Control Description With the y.yy icon, you can set the y scale precision for zero to three decimal places. If you enable the right-hand scale, a separate y.yy menu appears under the scale. You control the right- and left-hand scale precision independently. Use the x.xx icon to set the precision of the x scale from zero to two decimal places. This function applies only when the x-axis is a factor of time, not sample number. Display Options Click on the black (or white) box to change the graph background from white to black (or vice versa). Arrow Controls With the arrow controls, you can move the selection bar or crosshair in small increments. SensArray 4-9 AccuraC User Manual Chapter 4 Analyzing Data Using Crosshairs With crosshairs, you can select points on a line plot for a specific sensor. The line plot graph includes a pair of crosshairs that are useful for determining the values of points on the graph. Two crosshairs with open dots in the center are illustrated in Figure 4-5. You can use both crosshairs to observe the difference in time and temperature between two points on a plot. Red Crosshair Figure 4-5. Crosshairs on a Line Plot Graph Green Crosshair You can position crosshairs and read the corresponding values from the control window. The red and green crosshairs appear in the plot area of the line plot graph. The color of the crosshair corresponds to the color in the crosshair controls. The crosshair controls displays the x and y coordinates of the crosshair intersection, as shown below. Positioning Crosshairs To position the crosshairs in a specific area of the line plot graph, complete the following steps. Using the Zoom icon, zoom in on a portion of graph Click on the Crosshair icon Click on the green crosshair control Select the Bring to Center item from the pop-up menu. At this point, You can position the crosshairs, with the arrow control buttons, or by entering a value in the sample/time field, or by moving the crosshair directly AccuraC User Manual 4-10 SensArray Chapter 4 Analyzing Data To move the crosshairs directly, you must grab the crosshair within the graph and drag it to the desired location. Grabbing and dragging a crosshair along either of its axes moves the crosshair along only vertically or horizontally. To move the crosshair along both axes, grab and drag within the symbol at the intersection of the crosshairs axes. To use the arrow control buttons, first select the crosshair. Click on the Crosshair icon in the graphic window or click on the associated Red or Green Crosshair icon and select the Move with Arrows item from the pop-up menu. You have selected the icon successfully if black or white arrows appear around the icon. To select both crosshairs, first select one crosshair and then open the pop-up menu for the second one and select the Move with Arrows option. You move the crosshair left, right, up or down by pressing the appropriate arrow control button. The crosshair continues to move as long as you hold down the mouse button. The difference between the x positions and y positions of the two crosshairs can be read from the delta time and delta value columns on the crosshair controls. Depending on setting of the Scroll Graph with Cursors Preference, when positioning crosshairs, if you drag the crosshair outside the graph area in any direction, the graph may pan in that direction. If the crosshairs are not visible on the graph, click on the Red or Green Crosshair icon and select Bring to center from the pop-up menu. Locking Crosshairs on Sensors To view measurements from a specific sensor, you can lock a crosshair to that sensor. You access the lock menu items by clicking on the Padlock icons beside the green and red crosshair icons. Item Unlock Snap The following table describes options from the pull-down menu. Description Drag the crosshair anywhere on the graph. You can also move an unlocked crosshair by entering the coordinates into crosshair controls, shown below. Snaps the crosshair to a specific sensor. When Snap is selected, the crosshair snaps to the closest sensor. When a Snapped crosshair is dragged horizontally, it will follow the trace. When it is dragged vertically, it will snap from one sensor trace to another. SensArray 4-11 AccuraC User Manual Chapter 4 Analyzing Data Item Lock Description Locks the crosshair to a specific sensor. When Lock is selected, the crosshair locks to the closest sensor. Alternately, you can select a specific sensor in the bottom portion of the menu, and the crosshair will lock to that sensor. When a Locked crosshair is dragged horizontally, it will follow the trace. Locked crosshairs cannot be dragged vertically, and can only be moved to another sensor trace with the pop-

up menu. Note: Sensor names appear in gray on the menu if they are not enabled. Sensors can be enabled or disabled on the Sensor Map or Calculated and System Channels Legend. When the crosshair is locked or snapped, you can drag the crosshair to a specific location on the line or use the left and right arrow controls to move the crosshair in increments. The up and down arrow controls have no effect. The Padlock icon indicates if the crosshair is locked or snapped to a specific sensor. If the crosshair is snapped, the padlock is closed and gray. If neither option is selected, the padlock is open. Using Selection Bars With Selection Bars, you can view a scan or a specific range of time/sample readings. You can position selector bars with the following methods. Grab the bar and move manually. Select the bar and use the arrow control buttons. Enter values into the start and end times in the selection bar controls, shown below. You can use the pair of selector bars (shown in blue) to select scans on the line plot graph. The selector bars are initially located at the left and right edges of the plot, as shown in Figure 4-6. AccuraC User Manual 4-12 SensArray Chapter 4 Analyzing Data Figure 4-6. Using Selection Bars To view sensor data for a single sample in a point in time, called a scan, you use the left-

hand selector bar. You can also position both bars to select a range of data for creating an Animation or Derived file. Printing Line Plots You can print the line plot display, legends, and data file information. To print the current line plot, select FilePrint Window to print the current line plot or FilePrint Report to print the current line plot, along with information and comments about the file. Using the Numeric Display You can view temperature values superimposed on a graphic of the wafer using the Numeric display, shown in Figure 4-7, by selecting DisplaysNumeric on the Analysis window. The leftmost selection bar on the line plot (or the first scan selected in the data table) determines which sample is displayed in the Numeric display window. The temperature of each sensor is displayed at each sensor location. When you move a selection bar, the display updates automatically. You can move the selection bar without closing the Numeric display. SensArray 4-13 AccuraC User Manual Chapter 4 Analyzing Data Figure 4-7. Numeric Display The following table describes fields, buttons, and checkboxes on the Numeric display window. Field/Button/

Checkbox Definition or Result The date and sample time (expressed as the start time plus elapsed time). For example, 5/31/00 10:39 PM + 0:00 means that the data acquisition was started on May 31st, 2000 at 10:59 PM, and this scan is 0 (zero) seconds into the run. Uses the rotation logged with the sample. If no rotation is logged with the sample, the field is dimmed and cannot be checked. Rotates the display map relative to a centered position at the 0 value. To rotate the map clockwise, select decreasing values. Alternately, you can rotate the map counter clockwise by increasing the counter value. In addition, you can rotate the map by clicking directly on the wafer map and dragging. Displays the sensor identifier and temperature reading in the color related to the sensor on the line plot When checked, labels identify each specific sensor and the associated temperature value. If you do not check the box, the labels show only temperature values. The number of decimal places in which sample data is represented. You can select a new decimal place from the precision pop-up menu. When checked, centers the text over the colored dot representing the sensor. When unchecked, places the text above or to one side of the dot. The reverse video option for the wafer display. Clicking on this square toggles the map background color between black and white. To print the numeric display, chose File>Print Window or File>Print Report. AccuraC User Manual 4-14 SensArray Chapter 4 Analyzing Data Using Data Tables The data table presents the temperature data in a spreadsheet-like format in which each row shows readings taken during one sample, as shown in Figure 4-8. To open a Data Table window, select DisplaysTable on the Analysis window. The tabular data corresponds to the data that appears in the Analysis window. Figure 4-8. Data Table Window Note: The cells in the data table are display only. You cannot enter or update information in the cells. The data in the table appears in rows and columns. The headings appear across the spreadsheet in the following order. Column Heading Description Sample number of each row. Starting time of the sample relative to the start of acquisition. RTD1, RTD2, etc. Data from the sensors of the Process Probe wafer. Calculated Channels Calculated channel values, if specified. Selecting Data With the data table, you can select data that you want to view. Selected data is reflected by the position of the Selection Bars in the Analysis window. You have the option of selecting one sample, all samples, or a range of samples. Select one sampleClick on the row where the sample is listed. This action automatically de-selects previous selections. Select all samplesUse the Data Table arrow menu. Select a range of samplesClick on the sample, hold down the <Shift> key and select another sample. The samples do not need to be adjacent. Using this procedure, you can also extend the range of a selected set of samples. SensArray 4-15 AccuraC User Manual Chapter 4 Analyzing Data Data Table Options You can control the data table display using options from a pull-down menu. To access options menu, click on the Arrow icon on the Data Table window. The following table describes the options. Option Always on Top When this option is checked, the table will float on top of all open Result Thermal MAP windows. Prints the data table. A Print dialog box appears in which you can set parameters and proceed or cancel the print job. Opens a dialog box where you can select printer options. This command opens a window where you can change the number of digits each data column in the data table displays. (The format of the Sample Number and Time columns is determined automatically and cannot be changed). To save the settings as the default for viewing the data table, check the Make Current Setting Default check box. Selects every sample in the data table. Opens online help for this window. Print Printer Setup Format Select All Help AccuraC User Manual 4-16 SensArray Chapter 4 Analyzing Data Displaying Information about the Data File To view information about the data file, select DisplaysInfo on the Analysis window to open the Data Info window, as shown in Figure 4-9. The left side of this window displays information such as operator name, time and date of creation, and parameters established before acquisition. This is display-only information;

you cannot edit or update information. In the Comments section, you can edit or update the comments by clicking in the box and entering changes. Figure 4-9. Data Info Window SensArray 4-17 AccuraC User Manual Chapter 4 Analyzing Data Displaying Information about the Wafer Configuration To view information about the wafer used to acquire the temperature data, select DisplaysWafer Config. The window shown in Figure 4-10 appears. Figure 4-10. Wafer Configuration Viewer The Wafer field defaults to the wafer configuration for the current open Analysis window. Click on the field to open a menu of all the wafer configurations available, or click on the up/down arrows to move through the list one-by-one. If multiple Analysis windows are open and you change the current open window, the wafer configuration displayed by the viewer automatically changes to reflect the currently selected window. By placing the mouse cursor over a sensor on the sensor map in the upper right-hand corner of the viewer, the line for that sensor is highlighted in the table. AccuraC User Manual 4-18 SensArray Chapter 4 Analyzing Data Contour and Surface Maps After selecting sample data from the line plot graph, you can view the data in detail by using the contour or surface map display. In addition, you can print the map with options from the display window. Displaying Contour and Surface Maps You can select a sample for display from the line plot graph or the data table. In addition, you can display multiple surfaces and/or contour maps for several data samples simultaneously from a single data file. To display a map, perform the following steps. 1. Open a data file. 2. Move the left-hand Selection Bar to the sample on the line plot, or click on the sample number from the Data Table. 3. If you select more than one sample in the Data Table, the map plots the sample with the lowest sample number. If you are using the graph and both selection bars are positioned on the line plot, the map plots the lowest sample number (or time). 4. Select DisplaysContour or DisplaysSurface from the Analysis window. For more information, see the following sections, Contour Maps and Surface Maps. Before the display window is shown, the surface fit is computed. Computing time varies from a fraction of a second to several seconds, depending on the surface fit algorithm selected and the speed of the computers microprocessor. Contour Maps The contour map, as shown in Figure 4-11, displays sample temperature variations across the wafer. You can use the contour to visualize the spatial temperature distribution in the wafer at a given point in time. Variations are represented as colored isothermal lines, similar to a topographical map. The mean temperature displays as a thick line. You can change the number of isothermal lines used in the contour. SensArray 4-19 AccuraC User Manual Chapter 4 Analyzing Data Figure 4-11. Contour Map Window To the left of the map, the vertical list of temperatures corresponds to each isothermal line by color. If you specified system or calculated channels in the data file prior to acquisition, these values appear at the bottom of the window. Surface Maps The surface map, shown in Figure 4-12, like the contour map, displays temperature variations over the wafer surface at a given time. A three-dimensional wire frame perspective displays the data. The x and y (width and depth) values represent a position on the wafer, and the z value (or height) represents the temperature at that position. You can change the perspective of the viewpoint, such as the elevation and rotation parameters, and the size of the image. Figure 4-12. Surface Map Window in Auto Scale Mode AccuraC User Manual 4-20 SensArray Chapter 4 Analyzing Data Setting Options for Displaying Contours and Surfaces With contour and surface displays, you can visualize temperature data on a wafer. This section describes options you use to control the representation of data, including menu items from the contour and surface maps, as shown in Figure 4-13. To access the pull-down menus on the contour or surface display, press the Arrow icon in the upper right corner of the display to shown the menus in Figure 4-13. Contour Surface Figure 4-13. Map Menu Items While some options apply to one map type solely, other options apply to both. Always On Top keeps the open window on top of other open Thermal MAP windows. This makes it easier to view multiple formats of the same data set simultaneously. Copy to Clipboard copies the Surface or Contour map graphic onto the clipboard so it can be pasted into another application. Save to file saves the created Surface or Contour map to a graphics file for viewing at a future time or for inserting into other documents. You can alter the vantage point or the representation of data in the maps. For example, surface maps show temperature readings in topographical form and by using the Surface Scale option, you can vary the height and depth of the form, or use Viewpoint option to alter the angle of view. The Surface Fit option from the pull-down menu defines the graphical form for contour and surface maps. Each of the available methods fits a surface to the data in unique manners. In addition, you can select White/Black Background and Help from both menu items. The White/Black Background option changes the background of the map from black to white, and vice versa, and the Help option opens the online help for that window. SensArray 4-21 AccuraC User Manual Chapter 4 Analyzing Data Printing Contours and Surfaces You can print contours and surfaces by selecting Print from the pull-down menu located in the upper right-hand corner of the display window. In the Print dialog box, press the OK button. If you want to set up your printer before printing (for example, to print in Landscape mode), select Printer Setup... from the menu on the Surface, Contour, or Table window. A print setup dialog box displays. Note: Refer to the printer manual for more information about the print dialog box, page setup dialog box, printer setup, and other functions related to printing. Specifying Surface Fit and Resolution With the Surface Fit option, you can change the type of surface fit and resolution from the default values set by the program. From the Contour or Surface window, select the Surface Fit option and the Surface Fit settings dialog box shown in Figure 4-14 displays. The default value is Local Weighted Least Squares with a resolution of 2 mm. Figure 4-14. Surface Fit Settings Dialog Box The surface fit includes only the sensors that are enabled before data acquisition. Therefore, if one or more sensors are disabledfor example, an open, damaged, or questionable sensor is excludedthe sensor is removed from the surface fit calculation. The surface fit also ignores sensors that are disabled from the Line Plot window. To work at optimal performance, the Global and Local Weighted Least Squares algorithms require many, well distributed sensors on the wafer. The following table describes buttons and fields on the Surface Fit window. AccuraC User Manual 4-22 SensArray Button or Field Chapter 4 Analyzing Data Description Global Weighted Least Squares (Default)more than about 12 sensorsAn approximating algorithm with global sensor consideration. Local Weighted Least Squaresmore than about 12 sensorsSimilar to Type 1, this type is modified so that the influence of a sensor on a data point is inversely proportional to the distance of that point to the sensor. Note: On computers with slower microprocessors, the % Complete Bar Graph window indicates the percentage of completion of the surface fit computation. To cancel the surface fit, press the Cancel button on the Progress Bar window. A dialog box appears in which you can select a new method or resolution or cancel. Local Weighted Shepards Methodany number of sensorsAn interpolating method with local consideration. The resolution of the surface fit, in millimeters. The resolution can be any integer between 1mm and 10mm. The smaller the resolution, the longer time it takes to compute the surface fit. The default, 2 mm, offers good resolution and reasonable computation time. Applies the current method automatically until you select another setting. Applies changes without closing the window. The contour and/or surface plot update automatically to reflect the change in surface parameters. Closes the window and applies the changes. The contour and/or surface plot update automatically to reflect the change in surface parameters. Closes the window and cancels any changes. The surface fit characteristics remain as before. Opens the online help for this window Comparison of Algorithms The following figures illustrate the surface map for each algorithm when applied to the identical set of sensor data. The attributes of each algorithm include advantages and disadvantages. Global Weighted Least Squares Approximation Global Support Advantage:

Disadvantages:

Computes relatively fast Smoothes the data too much. Requires many, well SensArray 4-23 AccuraC User Manual Chapter 4 Analyzing Data distributed sensors on the wafer. Local Weighted Least Squares Approximation Quasi-Local Support (based on distance from known points) Advantage:

No flat spots. Reasonably smooth. Probably most accurate fit for silicon. Disadvantages: Reasonably slow to compute. Does not work unless there are many well-distributed sensors selected on the wafer. Local Weighted Shepards Method Interpolation Local Support Advantage: Relatively fast to compute. Works with a few sensors selected. Disadvantages:

Renders flat spots at sensor locations. About Surface Fit Characteristics Before you can generate a contour or surface plot, a surface must be fitted to the sensor data. The interpolation of the data determines the form of the map. Based on a grid that represents positions on the wafer, temperature values can be approximated at regular intervals. You select the method of fitting this surface to the sensor data, as well as the resolution of the grid that represents the surface. However, each method fits the data to this area somewhat differently. Fitting sensor data from a Process Probe wafer to a temperature profile is an example of fitting a surface to given data points with x and y values in a plane. In practice, the known data points are used to produce a function of the form z = f(x,y); with this function, the height of the surface at any point (x,y) in the plane can be determined. There are many different methods for fitting a surface to data points; each has advantages and disadvantages. AccuraC User Manual 4-24 SensArray Chapter 4 Analyzing Data Computing by Height One classification of surface fitting methods is according to how the methods compute the height of the fitted surface at the given data points, or, in this case, the temperatures at the sensors. The choices are interpolation and approximation. InterpolationThe height of the surface is exactly the same as the given value at each of the known data points. An interpolating surface fit follows local features in the data more accurately. Yet, if the data is noisy, an interpolating fit may render inaccurate temperature features that do not exist. ApproximationThe surface follows a best fit scenario in which height is close tobut not necessarily accurate tothe values at the known data points. (However, all data points on the surface that lie in between the known data points are only approximate.) An approximating surface fit produces a smooth representation of the peaks and valleys in the data. Use this method when the data is noisy. Computing by Global or Local Support An independent classification of a surface-fitting method is whether the interpolation or approximation has global or local support. GlobalWhen computing the height of an in-between point on the wafer, the values of all of the known data points (sensors) are considered. LocalWhen computing the height of the surface of the wafer, only the sensors that are near the point being computed are considered. Note: For Thermal MAP, only the sensors that are enabled are computed for the surface fit. If only 12 sensors on a 17-sensor wafer are enabled, a surface fit uses only 12 sensors in the calculations. Options for Contour Maps Isotherms In addition to surface fit, the Contour Map window has the following options you can access from the Arrow icon. Show Mean Line Show Mean Line To show or hide the thick line representing the mean, click on the Arrow icon on the Contour window and select Show Mean Line. When the check mark appears to the left, then Show Mean Line is active. Setting Isotherms To control the number of isotherms shown in a map, click on the Arrow icon on the Contour window and select Isotherms. The dialog box shown in Figure 4-15 appears. SensArray 4-25 AccuraC User Manual Chapter 4 Analyzing Data Figure 4-15. Isotherms Configuration Window The following table describes fields and buttons on the Isotherms window. Button or Field Result Degrees Between IsothermsWhen you enter a value in this field and press the <Return> key, Thermal MAP creates isotherms with the specified delta. The number of Isotherms will be the lesser of Range e Temperatur Degrees Between or 127. If more than 127 isotherms are needed, only the lowest 127 are plotted. The entry automatically generates the number of Isotherms shown in the # of Isotherms field. If the value you enter is greater than the delta T of the wafer, no isothermal lines are drawn, except for the mean isotherm.

# of IsothermsWhen you enter a value and press the <Return> key, this value is divided into the contour temperature range. The plot will have N isotherms. The delta between adjacent isotherms will be Range Isotherms N This entry automatically generates the Degrees between Isotherms, or, the number of intervals into which the range is subdivided. Expands or contracts the window to show or hide Isotherm Range. Range limits are derived from the following sources. Auto (Default)Derives limits from the data file Surface ScaleApplies the settings from the associated surface map on the Surface Scale window. This is only enabled when surface scale is set to manual in the surface map. ManualYou can specify maximum and minimum values that define the range of temperatures listed with the wafer display and the range of the isotherms displayed. However, only the isotherms within the temperature range of the wafer appear on the wafer. Applies the new setting without closing the Isotherms window. Closes the Isotherms window and applies the new isotherm specification to the contour map. Closes the Isotherms window and cancels any changes. AccuraC User Manual 4-26 SensArray Chapter 4 Analyzing Data Opens the online help for this window. SensArray 4-27 AccuraC User Manual Chapter 4 Analyzing Data Options for Surface Maps In addition to surface fit, the Surface Map window has the following options you can access from the Arrow icon. Viewpoint Temperature Bands Surface Scale Surface Viewpoint You can change the perspective of a surface by altering the tilt, rotation, and size. For example, when viewing a three-dimensional map from a particular angle, the area you need to examine may be in a temperature valley that is hidden behind a temperature peak. You can change the perspective to reveal the valley. To change the viewpoint, click on the Arrow icon on the Surface window and select Viewpoint. The Viewpoint window opens, as shown in Figure 4-16. Figure 4-16. Surface Viewpoint Window The following are the default values for the Viewpoint Tilt (elevation)45 Rotation0 Size0.60 The following table describes fields and buttons on the Viewpoint window. AccuraC User Manual 4-28 SensArray Chapter 4 Analyzing Data Button or Field Definition or Result Set by using the knob, or by changing the value in the indicator field. Tilt is indicated in terms of degrees with the following definitions. 90 = viewing the temperature profile from directly above. 0 = viewing the profile from the edge of the wafer.

-90= viewing the profile from directly below. Set by using the knob, or by changing the value in the indicator field. Rotation is indicated in terms of degrees. The wafer shape shows the position of the wafer notch with respect to the viewpoint after applying the rotation. A digital indicator for rotation automatically updates as the rotation knob is turned. Thermal MAP uses the sensor lead exit pointwhere the sensor leads exit the waferas the 0 reference point. When viewing the profile from directly above

(tilt=90), and rotation set to 0, the sensor lead exit point is at the bottom of the map. Positive rotation occurs counter-clockwise when viewing from directly above. The rotation indicator displays rotation in the range of 0 to 359. Values outside the range are not allowed. Expands or contracts the Viewpoint window to show or hide the size control. Size is adjusted by sliding the slide control up or down, entering a value in the field or by using the advance buttons. The scale on the size control is relative to the following. By moving the slide control towards 1.0, you are in effect zooming in on the wafer. By moving towards 0.1, you are in effect zooming out from the wafer. Applies the current settings automatically until you select other settings. Applies any changes to the surface map. Closes the window and applies the new settings to the surface map. Closes the window and cancels the changes. Opens the online help for this window. Setting Temperature Bands To change the temperature band range, click on the Arrow icon on the Surface display window and select Temperature Bands. The Temperature Bands window opens, as shown in Figure 4-17. SensArray 4-29 AccuraC User Manual Chapter 4 Analyzing Data Figure 4-17. Temperature Bands Window The following table describes fields and buttons on the Temperature Bands window. Button or Field Result Degrees between Temperature BandWhen you enter a value in this field and press the <Return> key, Thermal MAP creates temperature bands with the specified delta. The number of temperature bands will be the lesser of Range e Temperatur Between Degrees or 127. If more than 127 temperature bands are needed, only the lowest 127 are plotted. The entry automatically generates the number of temperature bands shown in the # of Temperature Bands field. If the value you enter is greater than the delta T of the wafer, no isothermal lines are drawn, except for the mean isotherm.

# of Temperature BandsWhen you enter a value and press the <Return>

key, this value is divided into the contour temperature range. The plot will have N temperature bands. The delta between adjacent temperature bands will be Range e Temperatur N Bands This entry automatically generates the Degrees between Temperature Bands, or, the size of the intervals into which the range is subdivided. Expands or contracts the Temperature Bands window to show or hide the Temperature Band Range and Color if set for one band controls. The color in which to display a sample if only one temperature band is set. The default is red. Applies the current settings automatically until you select new settings. AccuraC User Manual 4-30 SensArray Button or Field Chapter 4 Analyzing Data Result The data range that the heights in the surface map span. Range limits are derived from the following sources. AutoDerives limits from the data file (Default) Surface Scale (Auto) Applies the settings from the associated surface map on the Surface Scale window. This is only enabled when surface scale is set to manual in the surface map. ManualYou can specify maximum and minimum values that define the range of temperatures listed with the wafer display and the range of the temperature bands displayed. Typically, you use this setting for creating animations, so that the range remains constant from frame to frame within an animation. If the maximum value is lower than the maximum value for the sample range, the window obscures the top portion of the graphic. Applies the new setting without closing the window. Closes the window and applies the new interval specification to the surface map. Closes the window and cancels any changes. Opens the online help for this window Options for Surface Scale The Surface Scale function controls how temperature data is scaled in the graphic window as well as the size of the map. In essence, the surface scale controls how temperature data is represented in relation to the wafer plane. The scale function creates the surface form of the data, or the topography. You have the option to display temperature data entirely above the plane. Or, you can identify extreme temperatures by higher temperatures above the plane and lower temperatures below. To change the temperature data scaling, click on the Arrow icon on the Surface Map window and select Surface Scale. The Surface Scale window appears, as shown in Figure 4-18. Figure 4-18. Surface Scale Window SensArray 4-31 AccuraC User Manual Chapter 4 Analyzing Data The following table describes fields, buttons, and the checkbox on the Surface Scale window. Field/Button/

Checkbox Definition or Result Scales data according to the temperature values in the sample. The plane is drawn below the lowest temperature value, in a manner in which the entire temperature surface appears to float above the plane. This prevents the plane from hiding the surface. Note that because the height is scaled to the data range, large features on the plot (high peaks and deep valleys) may actually represent very small temperature differences. By selecting this radio button, you can manipulate the Maximum, Plane, and Minimum fields. With the maximum and minimum controls, you can specify the following values. Vertical scaling limits of the graph. If these values are significantly outside the actual temperature range of the wafer, the wafer appears almost flat. If these values are inside the temperature range on the wafer, the vertical scale is exaggerated and parts of the wafer may be outside the window. Limits of the color spectrum when the Surface Scale is selected for the range. The maximum value specifies the temperature of red, and the minimum value specifies the temperature of blue. The temperature equivalent of the three-dimensional plane. For example, you can use the control to set the plane to the mean temperature of the wafer, so that the hotter portions of the wafer are drawn above the plane, and the cooler portions below the plane. In another example, you can set the plane to the desired setpoint of your process, so the deviating portions of the wafer are drawn above and below the plane. Applies the current settings automatically until you select new settings. Applies the new setting without closing the window. Closes the window and applies the new scale specifications to the surface display. Closes the window and cancels the changes. The scaling settings will remain as they were. Opens the online help for this window AccuraC User Manual 4-32 SensArray Chapter 4 Analyzing Data Animating Analysis Displays With the Thermal MAP 3 animation feature, you can create animation, or movies, of a time-series of contour maps, or surface maps, or both, from your data set. You use animation to gain insight into how temperature profiles change over time. The Animation feature includes creating new animations and playing saved animations. Creating an Animation You can create animations by completing the following steps. Open a data file Select the scan range to incorporate in your animation Open the Animation Setup window by selecting AnimationCreate from the Analysis window. (Two plots also open: a surface and a contour plot.) Use the Animation Setup window to adjust the plots and animation settings. Use the Create Animation button on the Animation Setup window to generate the animation. Animation Setup At the left side of the Animation Setup window, you see sample number and animation frame settings. You can incorporate many samples into the animation. The following table describes fields and buttons on the Animation Setup window. Field/Button Definition or Result Reduce the number of actual samples that are incorporated in your animation. For example, if you set the Record Every control to 2 frames, sample 0, 2, 4 and so on are recorded on the animation. You may choose a smaller set in the interest of time. Animation Setup defaults to using both a surface plot and a contour plot in your animation. If you prefer to display one plot only, you can close the other plot. For example, if you prefer to display the surface plot only, press the Close Contour button. Opens the Temperature Bands configuration window for surface plots. See the Setting Temperature Bands section of this chapter for more information. Opens the Isotherms configuration window for contour plots. See the Setting Isotherms section of this chapter for more information. SensArray 4-33 AccuraC User Manual Chapter 4 Analyzing Data Field/Button Definition or Result Opens the Viewpoint configuration window for surface plots. See the Surface Viewpoint section of this chapter for more information. Opens the Surface Fit configuration window. See the Specifying Surface Fit and Resolution section of this chapter for more information. Opens the Surface Scale configuration window. See the Options for Surface Scale section of this chapter for more information. Opens online help at a text explanation of the window Generates the animation. Does not generate an animation. Closes the Animation Setup window and the plots in the Animation Setup. By pressing the Create Animation button, the Animation Setup window closes and the Animation File dialog box opens, as shown in Figure 4-19. Figure 4-19. Create Animation Dialog Box In the box, you specify the file name for the animation and press the Save button. The default directory for a new user is C:\Sensarray\Animations. If you change the directory, the software remembers the last directory used by each user and changes the default. As the software creates the animation, a progress screen indicates how many frames are completed. When your animation is completed, the plot windows for the animation close. Playing the Animation After creating and saving the animation to a file, you can open and play the animation. You can play the animation on any Windows operating systemeven if Thermal MAP is not installedby using the Windows Media Player. Opening the Animation To open the animation, select AnimationPlay on the Analysis window. AccuraC User Manual 4-34 SensArray Chapter 4 Analyzing Data This action opens a file dialog box in which you can select an animation to play. After you select an animation and press the OK button, the animation opens, as shown in Figure 4-20. Figure 4-20. Sample Animation In addition, when you press the OK button on file dialog box, the TMAP Animation Player window opens, as shown in Figure 4-21. Figure 4-21. TMAP Animation Player Window Using the Animation Player The controls on the TMAP Animation Player are similar to controls on a compact disc player. Field/Button Definition or Function Pause or Stop. When clicked, the animation pauses and the button changes to the Play button. Play. When clicked, the animation starts and the button changes to the Pause button. If checked, the animation restarts upon reaching the end. Opens the online help for this window SensArray 4-35 AccuraC User Manual Chapter 4 Analyzing Data Field/Button Definition or Function Fast forward or step. If this button is clicked while the animation is playing, it steps forward. If clicked while the animation is paused, it advances a single frame per click. If you click and hold, the animation fast-forwards as long as the mouse button is depressed. Rewind or step. If this button is clicked while the animation is playing, it steps backward. If clicked while the animation is paused, it reverses a single frame per click. If you click and hold, the animation rewinds as long as the mouse button is depressed. Go to beginning. Clicking this returns the animation to the first frame. If the animation is playing at the time, it immediately starts playing. Go to end. Clicking this sets the animation to the last frame and stops the animation. Displays the elapsed time in minutes and seconds, and as a bar graph based on the percentage of the animation viewed. This adjusts the playback speed of the animation. Animations are recorded in real-

time; an animation comprised of five hours of scans takes five hours to play. You can adjust the Time Rate to speed up or a slow down the animation. Time Rate values range from 100X to 0.1X (one-tenth speed). To speed up: Use the values larger than 1X. To slow down: Use the values smaller than 1X Shows the playback rate (as modified by the Time Rate control) in scans per minute Shows the actual rate of the scans (as acquired) in scans per minute To exit the TMAP Animation Player, press the close box to close the Animation window. AccuraC User Manual 4-36 SensArray Chapter 4 Analyzing Data The Derived File Wizard The Derived File Wizard is a program that calculates statistical values on the measured data for a selectable period within the run or the complete run. It can also be used to determine the difference between two runs by subtracting the measured data from one file compared to another. The resulting file is called a derived file. The following types of analysis can be derived from selected thermal data in the Thermal MAP 3 window:

Minimum temperatureGives the minimum reading from the selected range of scans or time period for each sensor selected. Maximum temperatureGives the maximum reading from the selected range of scans or time period for each sensor selected. Temperature range (max-min)Gives the difference between the maximum and minimum value of the readings from the selected range of scans or time period for each sensor selected. Mean temperatureGives the mean temperature value for the readings over the selected range of scans or time period of each sensor selected. Standard deviationGives the standard deviation value for the readings over the selected range of scans or time period of each sensor selected. All Calculations (spreadsheet file)Gives all five of the above derived statistics for each sensor selected. These derived statistics are listed in a CSV spreadsheet file that is used by a spreadsheet program. Note: This file is NOT viewable with the Thermal MAP line plot graph. Difference between two files (File1 File2)Gives the difference between the two files measured values for equivalent sensor channels. This function provides for comparison between runs using the same or an equivalent instrumented wafer. Preparation Before using the Derived File Wizard, you can prepare a file or files in an Analysis window before you start the wizard, or you can set options within the wizard. Proper preparation of the file is key to effectively using the Derived File Wizard. Open a file normally in an Analysis window. If the File1 File2 function is to be used, open the second file in another Analysis window. Set any conditions to be used:

Adjust the cursors to the desired start and stop points. Enable and disable the sensors on the sensor map as desired. Highlight any sensors on the sensor map as needed. Enable any Calculated Inputs as desired. For File 1 File 2 difference function be sure the selected sensors and ranges are equivalent within the two files. A difference value is calculated for each scan number or scan time interval in the run. The selected range of scans or time period needs to be the same for both files so there will be an equal number of measurements for difference calculation. SensArray 4-37 AccuraC User Manual Chapter 4 Analyzing Data If a slope change such as heat up or cool down is included in the selected range of scans or time period, then accurately selecting an equivalent starting scan or time preceding the slope is required so that the slopes occur at the same times or scan number within the two runs. If this is not achieved then inaccurate difference measurement on the slopes will result. Creating Derived Files To create a Derived File, click on the Display Menu and select Derived File Wizard. The dialog box in Figure 4-22 appears prompting you to choose an open file for analysis from the current open files. In the example, only one file is open. Figure 4-22. Select Window Click on the file to select it for derived analysis. A reduced size XY Graph of that file will appear. If the parameters were not already set before starting the wizard, enable or disable sensors and select scans on its line plot graph. Click Next> to proceed with the setup. The dialog box in Figure 4-23 appears. Figure 4-23. Format Window In this panel, select the type of analysis to perform. Selecting Mean will cause the Derived Files Wizard to calculate the Mean Temperature over the selected time or scans. Click Next> to proceed. AccuraC User Manual 4-38 SensArray Note:

Chapter 4 Analyzing Data If you selected File1 File2 at this point, the system will open an additional window similar to Figure 4-22 to prompt you to open a second file to subtract its measured values from the first file opened. Click on the desired file to select it . Click Next> to proceed Next, choose the sensors to be included in the analysis. The panel shown in Figure 4-24 appears:

Figure 4-24. Sensors Window After the number of sensors are selected, Click Next> to proceed. The derived data will be calculated and Thermal MAP 3 derived file X-Y Graph will appear as shown in Figure 4-25. Figure 4-25. Derived File Results Window SensArray 4-39 AccuraC User Manual Chapter 4 Analyzing Data Thermal MAP calculates and displays the requested format: mean, min, max, etc. In this example, it displays the mean or average temperature of each sensor in the selected data run. The new analysis window is automatically named with the word -mean appended to the original file name. The new windows can be printed or saved. Most Thermal MAP Analysis features are active for Derived Files. Contour maps and surface maps can be viewed if enough sensors are recorded and selected. The numeric display can usually be viewed. The Derived File can be saved for future reference by pressing FileSave. If the window is closed without saving, the program will prompt you to save the file results. To print the Derived File report, from the File menu choose Print Window to print the report as shown on the screen, or Print Report that includes sensor map, date and time of report, wafer type used, etc. AccuraC User Manual 4-40 SensArray