FCC ID: 2AZ8A-NFD-100 SQF Flow rate FOUP

N2 Qual. Particle FOUP Product Specification

(December, 2019) PLUTOSOLUTION The material contained in this product specification is proprietary to the PLUTOSOLUTION and may be subject to legal punishment if it is reproduced and used without permission. There may be some differences between the product image and the physical presence contained in the specification. Contents Contents .................................................................................................................... 2 Introduction of the product ............................................................................. 3 Composition of the product ............................................................................ 4 Main Product Information ................................................................................ 5 Particle FOUP ..................................................................................................................................................... 5 External Appearance ............................................................................................................................ 5 Interior ........................................................................................................................................................ 6 Product specification ........................................................................................................................... 7 Board Specification ......................................................................................................................................... 8 IoT module (Main Board) .................................................................................................................. 8 Indicator Board .................................................................................................................................... 10 Wireless / Wired Charge Rx Board ............................................................................................ 12 Sensor & Pump Specifications ............................................................................................................... 14 Flow sensor ........................................................................................................................................... 14 Flow sensor monitor ......................................................................................................................... 15 Particle counter ................................................................................................................................... 16 Vacuum pump ..................................................................................................................................... 17 Precautions ......................................................................................................... 19 N2Q FOUP 2 Introduction of the product FOUP is designed to check the gas flow into the FOUP. Quantity measurements by dust size, flow measurements by pass among N2 GAS entering FOUP, and FOUP settling LEVEL measurements are collected and forwarded to the server. N2Q FOUP 3 Composition of the product Particle FOUP ADB Cable 12.6V 13.6A Lithium-ion battery pack 12.6V 4A charger Division Model Quantity

(EA) FOUP Particle FOUP ADB Cable Particle FOUP Accessory 12.6V 4A Charger 12.6V 13.6A Lithium-ion battery pack 1 1 1 1 Remarks Battery pack included For charging the battery pack N2Q FOUP 4 Main Product Information Particle FOUP External Appearance

<Front View> <Right Side View>

Location Designation Battery charge indicator Status LED

- Network, Power Status LED

- Particle detection Flow sensor monitor (Bypass Flow) Power switch ADB connector (Wired charging port - 24V 6.25A Power adapter connection) N2Q FOUP 5 Interior Location Details IoT module (Main Board) Particle counter Vacuum pump Flow sensor Speed Controller 12.6V 13.6A Lithium-ion battery pack Wireless Charging RX Coil Mount Magnetic switch N2Q FOUP 6 Magnetic Finger Valve (Rear1, Rear2) Power switch ADB connector (Wired charging port - 24V 6.25A Power adapter connection) Product specification Division Main specifications IoT ARM Cortex-A53 Quad Core 1800MHz Platform LP-DDR4 1024MB / eMMC 8GB Wireless Wi-Fi 802.11 ac/a/b/g/n Power 12.6V / 13,600mAh Lithium-ion Battery Pack

(Connecting connector: Molex 5557-04R) Power state LED : Green Communication status LED : Green Display Particle Detection Status LED : Green+Red Battery charge : Red 2-digit Seven Segment LED 1 x flow sensor monitor : (model name: PFM311-MLEF) Dual-Axis Digital Inclinometer and Accelerometer (ADIS16209) Sensor Particle counter (model name: Airnet II 201 with 24VDC) 1 x flow sensor (model name: PFM525-C6-2-R) Vacuum pump I/F Operating 1 x vacuum pump (model name: DP0102S) 1 x power switch 1 x ADB connector temperature 0 ~ 50 range N2Q FOUP 7 Weight Entegris Particle FOUP: 8.44 Kg Miraial Particle FOUP: 8.61 Kg Board Specification IoT module (Main Board) Appearance Location Designation

(1)

(2)

(3)

(4) iMX8M Mini SOM (System On Module) WiFi 5GHz Antenna Indicator Board Connection Connector (I2C) Magnetic Switch Connection Connector

(5) Flow sensor Connection Connector (Power + signal)

(8)

(9) N/A Particle sensor power Connector

(10) Vacuum pump power Connector N2Q FOUP 8

(11)

(12)

(13)

(14)

(15)

(16) Particle Sensor Connection Connector (Ethernet for data) Wireless / wired charging Rx Board Connection Connector External power + ADB to USB Connection Connector Power switch connection Connector Connect the rechargeable battery pack Connector 2-axis digital angle and accelerometer Product specification Location Designation IoT ARM Cortex-A53 Quad Core 1800MHz Platform LP-DDR4 1024MB / eMMC 8GB Wireless Wi-Fi 802.11 ac/a/b/g/n Power 12.6V / 13,600mAh Lithium-ion Battery Pack

(Connecting connector: Molex 5557-04R) Sensor Dual-Axis Digital Inclinometer and Accelerometer (ADIS16209) 1 x Indictor Board connection port (Connection Connector:

35507-0400) 1 x Magnetic Switch connection port (Connection Connector:

PHR-2) 1 x flow sensor connection ports (Connection Connector:

35507-0500) 1 x particle sensor power connection port ( :

I/F 172256-1002) 1 x vacuum pump power connection port ( :

172256-1002) 1 x connection port for particle sensor data ( :

RJ45) 1 x wireless / wired charging Rx Board connection port

(Connection Connector: 5557-6R) External power + 1 x ADB to USB connection port (Connection Connector: 5557-6R) N2Q FOUP 9 1 x power switch connection port (Connection Connector:

5557-04R) 1 x rechargeable battery pack connection port (Connection Connector: 5557-04R) Operating temperature 0 ~ 50 range Weight 265.5 g Size W200 x d160 x h20 mm (Antenna exclusion height) Indicator Board Appearance Location Designation

(1)

(2)

(3)

(4)

(5) Battery level indicator (2-Digit Seven Segment LED) Communication status display LED (Green) Power status indicator LED (Green) Particle Status Display LED (Green+Red) Main Board Connection Connector (I2C) N2Q FOUP 10 Product specification Division Main specifications Battery level indicator Communication status LED Red 2-Digit Seven Segment LED Battery voltage % display (10, 20, ~, 90, 99:FULL)

"Voltage" and "LL" cross indications below 30%

Green LED Blink when trying to connect to WiFi, On when transmitting data Power Status Green LED Indicator LED On when power is applied Red-Green LED Particle Status Red Blink on Particle Sensor Error LED Red On when detecting particles Undetected Particles Green On POWER 3.3V (Power supply from main board) 1 x main board connection port (Connection Connector:

35507-0400) I/F Operating temperature 0 ~ 50 range Weight 10.5g Size w50 x d30 x h23 mm N2Q FOUP 11 Wireless / Wired Charge Rx Board Appearance Location Designation

(1)

(2)

(3)

(4) Main Board Connection Connector Ferrite Plate Coil Lead Wire Product specification Division Wired /

wireless charging I/F Main specifications Input power : 24V / 6.5A (Adapter Specification) Output power : 12.6V / 4A 1 x main board connection port (Connection Connector:

5569-06A2) 1 x Magnetic Switch connection port

(Connection N2Q FOUP 12 Connector : 5264-02) Operating temperature 0 ~ 50 range Weight 156g (Rx Coil Included) Size Rx Board : w100 x d90 x h20 mm (Heat sink Included) Rx Coil : w70 x d60 x h6.9 mm (Ferrite Plate Included) N2Q FOUP 13 Sensor & Pump Specifications Flow sensor Appearance Product specification Division Main specifications Model name PFM525-C6-2-R Applicable fluid Dry air, N2, Ar, CO2 Flow rate range 0.5 to 25 L/min Accuracy 3% F.S. or less Repeatability 5% F.S. or less (base on 0.35 MPa) Operating pressure range Rated pressure range

-100 kPa to 750 kPa

-70 kPa to 750 kPa Proof pressure 1 MPa Analog output Power supply voltage Operating temperature range Response time : 1 sec Current output: 4 to 20 mA 24 VDC 10%

0 to 50oC Size w64.6 x h43 x d18 (mm) Weight 55 g N2Q FOUP 14 Flow sensor monitor Appearance Product specification Division Main specifications Model name PFM311-MLEF Applicable Sensor PFM525 Instantaneous flow Display flow range : 0.5 to 26.3 L/min Min. setting/display unit : 0.1 L/min Accumulated flow Setting / display flow range : 0 to 1999999 L Min. setting /display flow unit : 1 L Accumulated flow volume per pulse 0.1 L/Pulse Display Unit Instantaneous flow : L/min, CRM x 10-2 Accumulated flow : L, ft3 x 10-1 Output current : 4 to 20 mA Analog output Response time : 1.5 sec Accuracy : 1% F.S. max. Sensor Input Current input : 4 to 20 mA Repeatability 0.1% F.S. max. (Fluid : Dry air) Analogue output accuracy : 0.3% F.S. max. Display accuracy 0.5% F.S. 1digit max. N2Q FOUP 15 Power supply voltage Operating temperature range 24 VDC 10%

0 to 50oC Size w30 x h30 x d35.7 (mm) Weight 30 g Particle counter Appearance Product specification Division Main specifications Model name Airnet II with 24VDC (201-4) Size range (m) 0.2, 0.3, 0.5, 1.0 Flow rate 0.1 CFM (2.8 LPM) Counting efficiency 50% 20% for most sensitive channel 100% 10% at 1.5 to 2.0 times channel one size Zero count 70.7 counts/m3 Max. concentration 5,057,310 /ft3 N2Q FOUP 16 Laser source Diode / Class 1 per EN60825) Flow system External vacuum 1/4 connection Power supply voltage Operating temperature range 24 VDC 0.5A 4 to 35oC Size W135 x h890 x d960 (mm) Weight 630 g Vacuum pump Appearance Product specification Division Main specifications Model name DP0102S Attainable vacuum

-26.7 kPa Free air displacement 7.0 L/min Working pressure

-26.7 kPa to 45 kPa N2Q FOUP 17 range Rated performance 5,000 hours Max. concentration 5,057,310 /ft3 Rated voltage 24 VDC (Max. current: 0.5A) Operating temperature range 4 to 35oC Size 50 (L) x 30 (W) (mm) Weight 250 g N2Q FOUP 18 Precautions Make sure to use connectors and cables that match the connection terminals. Using a connector other than the dedicated connector may cause product malfunction or failure. Secure the unit firmly where you want to install it. Do not install in water or rainwater spatter or damp areas. Be careful not to introduce moisture or other foreign substances into the product. Be careful not to drop the product or give an external shock. Do not disassemble, modify, or alter the product arbitrarily. This product is designed for use in the temperature range of 0 C to 50 C. Outside this range, use at extremely low or high temperatures is undesirable. Do not install or use the product outside of its intended purpose. If there is a burning smell during operation, immediately turn off the power and contact the PLUTOSOLUTION Customer Support Center (031-337-

6780) FCC This device complies with part 15 of the FCC Rules. Operation is subject to the following two conditions: (1) This device may not cause harmful interference, and (2) this device must accept any interference received, including interference that may cause undesired operation. Any changes or modifications (including the antennas) to this device that are not expressly approved by the manufacturer may void the user's authority to operate the equipment. N2Q FOUP 19 Note :

This equipment has been tested and found to comply with the limits for a Class A digital device , pursuant to part 15 of the FCC Rules. These limits are designed to provide reasonable protection against harmful interference in a residential installation . This equipment generates, uses and can radiate radio frequency energy and, if not installed and used in accordance with the instructions , may cause harmful interference to radio communications. However, there is no guarantee that interference will not occur in a particular installation . If this equipment does cause harmful interference to radio or television reception , which can be determined by turning the equipment off and on, the user is encouraged to try to correct the interference by one or more of the following measures:

Reorient or relocate the receiving antenna. Increase the separation between the equipment and receiver. Connect the equipment into an outlet on a circuit different from that to which the receiver is connected. Consult the dealer or an experienced radio/TV technician for help. This device is installed inside the facility. This device is used at a distance of more than 20cm from the human body. RF Exposure Statement FCC RF Radiation Exposure Statement: This equipment complies with FCC RF Radiation exposure limits set forth for an uncontrolled environment. This device and its antenna must not be co-located or operating in conjunction with any other antenna or transmitter.. N2Q FOUP 20

[NFD-100] FCC Label Sample SIDE FCC ID : 2AZ8A-NFD-100 Product : SQF Model : NFD-100 S/N : ND100XXXXXXXXXX Input : 12.6V , 4A MFD : 2023.10

Manufacturer PLUTOSOLUTION. INC Made In www.plutosolution.com Korea The device complies with Part 15 of the FCC rules. Operation is subject to the following two conditions:

1) This device may not cause harmful interference, and 2) This device must accept any interference received. Including interference that may cause undesired operation

PLUTO Solution Inc. B-1122, Kumkang Penterium IT Tower 282, Hagui-ro, Dongan-gu Anyang-si, Gyeonggi-do South Korea Federal Communications Commission Authorization and Evaluation Division 7435 Oakland Mills Road Columbia, MD 21046 USA Date: December 04, 2023 Letter of Authorization We, the undersigned, hereby authorize Geunki Son of Dt&C Co., Ltd. to act on our behalf in all manners relating to application for equipment authorization for FCC ID: 2AZ8A-NFD-100 including signing of all documents relating to these matters. Any and all acts carried out by Geunki Son of Dt&C Co., Ltd. on our behalf shall have the same effect as acts of our own. This authorization is valid until further written notice from Grantee. I, the undersigned, hereby certify that we are not subject to a denial of federal benefits, that includes FCC benefits, pursuant to Section 5301 of the Anti-Drug Abuse Act of 1988, 21 U.S.C. 853(a). Sincerely, INSUK SON

/ Representative

/ PLUTO Solution Inc. Rev 1/26/2023

Certification designating a U.S. Agent for service of process:

As required by section 2.911(d)(7), the applicant must designate a contact located in the United States for purposes of acting as the applicants agent for service of process, regardless of whether the applicant is a domestic or foreign entity. An applicant located in the United States may designate itself as the agent for service of process. In either scenario, the designation of the U.S. agent for service of process should be provided as an attachment to the equipment authorization application. The applicant must provide a written certification, which must:

i. Be signed by both the applicant and designated agent for service of process, if the agent is different from the applicant. ii. Acknowledge the applicants consent and the designated agents obligation to accept service of process. iii. Provide a physical U.S. address and email for the designated agent. iv. Acknowledge the applicants acceptance to maintain an agent for no less than one year after the grantee has terminated all marketing and importation or the conclusion of any Commission-related proceeding involving the equipment. Unofficial information provided by FCC personnel on February 14, 2023, via the monthly call with the TCB Council:

The Agent for Process of Service:

cannot be a TCB or affiliated with a TCB (e.g. could not be a person who works for a TCB or a company that owns or is owned by the TCB) cannot be a [FCC recognised] Lab or affiliated with a test lab (e.g. could not be a person who works for a Lab or a company that owns or is owned by the Lab) Agent can be Individual Entity or a Company Entity Agent Entity must be located in US, US address/phone Entity acting as Agent must have FRN (best practice, put FRN on Agent Letter) Agent letter does not have to be FCC ID specific, can be general Agent for Grantee For devices being marketed or for which marketing has ceased for less than 1 year, if the Agent for Process of Service changes, then for every TC Number the TCB must request the FCC to put application into Audit Mode and Agent Letter needs to be updated (superseded). NOTE: The U.S. Agent for Service of Process should not be confused with the authorized agent used for signing the 731 form, other cover letters within the application, and/or the agent who may interface with the TCB. PLUTO Solution Inc. B-1122, Kumkang Penterium IT Tower 282, Hagui-ro, Dongan-gu Anyang-si, Gyeonggi-do South Korea U.S. Agent Designation for Service of Process ATTENTION:

Federal Communications Commission Authorization and Evaluation Division 7435 Oakland Mills Road Columbia, MD 21046 USA REGARDING: FCC Certification Section 2.911(d)(7) Information Designated U.S. Agent Company Name: Approve-IT, Inc. Contact Name: Nathan Grinager Street Address: 8011 34th Ave South, Suite 342 City/Province/Zip: Bloomington, MN 55425 Telephone No: 651-247-1678 Email: team@approve-it.net FRN #: 0027533835 This letter is to confirm that we (the Designated U.S. Agent) have accepted the responsibility to act as the Designated U.S. Agent for Service of Process as required by section 47 CFR 2.911(d)(7) on behalf of the Applicant noted below. U.S. Agent Signature:

Date: December 6, 2023 Signed by (Printed Name/Title): Nathan Grinager / Co-President

*This letter is valid indefinitely for all applications submitted within the period of 12/6/2023 - 12/5/2024 The Applicant confirms its explicit consent and acknowledges that they must maintain an agent for no less than one year after terminating all marketing and importation OR the conclusion of any Commission-related proceeding involving the equipment. The applicant further acknowledges their responsibility to inform the FCC whenever the Designated U.S. Agent information above changes. Applicant Company name: PLUTO Solution Inc. Grantee FRN: 0031003148 FCC ID: 2AZ8A-NFD-100 Contact Name: INSUK SON Street Address: B-1122, Kumkang Penterium IT Tower 282, Hagui-ro, Dongan-gu Anyang-si, Gyeonggi-do South Korea City/Province/Zip:

Telephone No: +82-31-337-6780 Email: isson@plutosolution.com Applicant Signature:

Date: 12/04/2023 Signed by (Printed Name/Title): INSUK SON / Representative

PLUTO Solution Inc. B-1122, Kumkang Penterium IT Tower 282, Hagui-ro, Dongan-gu Anyang-si, Gyeonggi-do South Korea Federal Communications Commission Authorization and Evaluation Division 7435 Oakland Mills Road Columbia, MD 21046 USA Date: December 04, 2023 Ref: Attestation Statements Part 2.911(d)(7) Filing FCC ID: 2AZ8A-NFD-100

[PLUTO Solution] (the applicant) certifies that the equipment for which authorization is sought is not covered equipment prohibited from receiving an equipment authorization pursuant to section 2.903 of the FCC rules. Sincerely, INSUK SON

/ Representative

/ PLUTO Solution Rev 1/26/2023 PLUTO Solution Inc. B-1122, Kumkang Penterium IT Tower 282, Hagui-ro, Dongan-gu Anyang-si, Gyeonggi-do South Korea Federal Communications Commission Authorization and Evaluation Division 7435 Oakland Mills Road Columbia, MD 21046 USA Date: December 04, 2023 Ref: Attestation Statements Part 2.911(d)(5)(ii) Filing FCC ID: 2AZ8A-NFD-100

[PLUTO Solution] (the applicant) certifies that, as of the date of the filing of the application, the applicant [is not] identified on the Covered List ( as a specifically named entity or any of its subsidiaries or affiliates) as an entity producing covered equipment . Sincerely, INSUK SON

/ Representative

/ PLUTO Solution Rev 1/26/2023

PLUTO Solution Inc. B-1122, Kumkang Penterium IT Tower 282, Hagui-ro, Dongan-gu Anyang-si, Gyeonggi-do South Korea Federal Communications Commission Date: December 04, 2023 Authorization and Evaluation Division 7435 Oakland Mills Road Columbia, MD 21046 USA Request of Confidentiality FCC ID: 2AZ8A-NFD-100 To Whom It may Concern:

Pursuant to Sections 0.457 and 0.459 of the Commission`s Rules(CFR 47), and Section 552 (b) (4) of the Freedom of Information Act, we, PLUTO Solution Inc., hereby requests confidentiality and treatment of certain information accompanying this application. The materials contain trade secrets and proprietary information not customarily released to the public. The public disclosure of these matters might be harmful to the Applicant and provide unjustified benefits to its competitors. The requested permanent exhibits are listed as follows:

PERMANENT PERMANENT CONFIDENTIAL LIST Exhibit 1 2 3 4 Description Block Diagram Schematics Part Lists Operation Description The Applicant understands that pursuant to Rule 0.457, disclosure of this application and all accompanying documentations, where applicable, will not be public before the date of the Grant for this application. Sincerely, INSUK SON

/ Representative

/ PLUTO Solution Inc. Rev 1/26/2023